Anti-reflection coating and its production method

1. An anti-reflection coating comprising a mesoporous silica coating having bonded mesoporous silica nano-particles formed on a substrate, said mesoporous silica coating having a refractive index of more than 1.10 and 1.35 or less.

2. The anti-reflection coating according to claim 1 , wherein said mesoporous silica nano-particles have an average diameter of 200 nm or less.

3. The anti-reflection coating according to claim 1 , wherein said mesoporous silica nano-particles have a porous structure in which meso-pores are arranged hexagonally.

4. The anti-reflection coating according to claim 1 , wherein said mesoporous silica coating has a structure in which a pore diameter distribution curve determined by a nitrogen adsorption method has two peaks.

5. The anti-reflection coating according to claim 4 , wherein the pore diameter distribution curve of said mesoporous silica coating has a peak due to the diameters of pores in particles in a range of 2-10 nm, and a peak due to the diameters of pores among particles in a range of 5-200 nm.

6. The anti-reflection coating according to claim 5 , wherein a volume ratio of pores in said particles to pores among said particles is 1/2-1/1.

7. An anti-reflection coating comprising a dense coating and a mesoporous silica coating formed in this order on a substrate, said mesoporous silica coating having bonded mesoporous silica nano-particles and having a refractive index of more than 1.10 and 1.35 or less.

8. The anti-reflection coating according to claim 7 , wherein said dense coating is a single-layer, and wherein a refractive index decreases from said substrate to said mesoporous silica coating in this order.

9. The anti-reflection coating according to claim 7 , wherein said mesoporous silica nano-particles have an average diameter of 200 nm or less.

10. The anti-reflection coating according to claim 7 , wherein said mesoporous silica nano-particles have a porous structure in which meso-pores are arranged hexagonally.

11. The anti-reflection coating according to claim 7 , wherein said mesoporous silica coating has a structure in which a pore diameter distribution curve determined by a nitrogen adsorption method has two peaks.

12. The anti-reflection coating according to claim 11 , wherein the pore diameter distribution curve of said mesoporous silica coating has a peak due to the diameters of pores in particles in a range of 2-10 nm, and a peak due to the diameters of pores among particles in a range of 5-200 nm.

13. The anti-reflection coating according to claim 12 , wherein a volume ratio of pores in said particles to pores among said particles is 1/2-1/1.

14. The anti-reflection coating according to claim 7 , wherein said dense coating is a multilayer comprising pluralities of layers having different refractive indices.