Transfer substrate, method of manufacturing the same and method of manufacturing an organic electroluminescent element
A transfer substrate includes a base layer, a light-reflecting layer pattern, a light-to-heat conversion layer and a transfer layer. The transfer layer is formed on the light-to-heat conversion layer. A line shaped laser beam may be scanned over the entire area of the transfer substrate to transfer designated portions of the transfer layer onto designated electrodes on an array substrate to make an organic electroluminescent display. Thus, processing time may be reduced, and an organic electroluminescent element may be efficiently formed on a large-size substrate.
1. A transfer substrate comprising:
a base layer;
a light-reflecting layer pattern disposed on a first face of the base layer, the light-reflecting layer pattern having a plurality of light-transmitting areas and a light-reflecting area defining the light-transmitting areas, the light-reflecting area having reflectivity that is higher than reflectivity of the base layer;
a light-to-heat conversion layer disposed on the first face of the base layer corresponding to the light-transmitting areas; and
a transfer layer formed on the light-to-heat conversion layer.
2. The transfer substrate of claim 1 , wherein openings are formed through the light-reflecting layer pattern corresponding to the light-transmitting areas.
3. The transfer substrate of claim 2 , wherein the light-to-heat conversion layer is disposed in the openings.
4. The transfer substrate of claim 3 , wherein the light-to-heat conversion layer extends to the light-reflecting area, and is formed on the light-reflecting layer pattern.
5. The transfer substrate of claim 3 , further comprising a planarization layer formed on the light-reflecting layer pattern and the light-to-heat conversion layer, wherein the transfer layer is formed on the planarization layer.
6. The transfer substrate of claim 2 , further comprising a planarization layer that fills the openings formed through the light-reflecting layer pattern and is formed on the light-reflecting layer pattern, wherein the light-to-heat conversion layer is formed on the planarization layer.
7. The transfer substrate of claim 6 , wherein the light-reflecting layer pattern comprises a plurality of optical interference layers, each of the optical interference layers comprising:
a first thin film facing the first face of the base layer and having a first optical refractive index; and
a second thin film disposed on the first thin film and having a second optical refractive index smaller than the first optical refractive index.
8. A transfer substrate comprising:
a base layer;
a light-to-heat conversion layer disposed on a first face of the base layer;
a transfer layer formed on the light-to-heat conversion layer; and
a light-reflecting layer pattern disposed on a second face opposite to the first face of the base layer, the light-reflecting layer pattern having a plurality of light-transmitting areas and a light-reflecting area defining the light-transmitting areas.
9. The transfer substrate of claim 8 , wherein the light-to-heat conversion layer has a shape corresponding to the light-transmitting areas.
10. The transfer substrate of claim 8 , wherein the light-to-heat conversion layer is disposed corresponding to all of the light-transmitting areas and the light-reflecting area.
11. The transfer substrate of claim 8 , wherein the light-reflecting layer pattern comprises a plurality of optical interference layers, each of the optical interference layers comprising:
a first thin film facing the second face of the base layer and having a first optical refractive index; and
a second thin film disposed on the first thin film and having a second optical refractive index smaller than the first optical refractive index.
12. The transfer substrate of claim 11 , wherein openings are formed through the optical interference layers corresponding to the light-transmitting areas.
13. A method of manufacturing a transfer substrate, the method comprising:
forming a light-reflecting layer pattern having a plurality of light-transmitting areas and a light-reflecting area defining the light-transmitting areas on a first face of a base layer, the light-reflecting area having reflectivity that is higher than reflectivity of the base layer;
forming a light-to-heat conversion layer on the first face of the base layer corresponding to the light-transmitting areas; and
forming a transfer layer on the light-to-heat conversion layer.
14. The method of claim 13 , wherein forming the light-reflecting layer pattern comprises:
forming a light-reflecting layer on the first face of the base layer; and
forming openings through the light-reflecting layer corresponding to the light-transmitting areas.
15. The method of claim 14 , wherein forming the light-to-heat conversion layer comprises forming the light-to-heat conversion layer in the openings, and wherein the method further comprises forming a planarization layer on the light-to-heat conversion layer prior to forming the transfer layer.
16. The method of claim 14 , further comprising forming a planarization layer disposed on the light-reflecting layer pattern and filling the openings formed in the light-reflecting layer pattern, and wherein the light-to-heat conversion layer is formed on the planarization layer.
17. The method of claim 14 , wherein forming the light-reflecting layer pattern comprises:
forming a first thin film facing the first face of the base layer and having a first optical refractive index; and
forming a second thin film having a second optical refractive index smaller than the first optical refractive index on the first thin film.
18. A method of manufacturing a transfer substrate, the method comprising:
forming a light-to-heat conversion layer on a first face of a base layer;
forming a transfer layer on the light-to-heat conversion layer; and
forming a light-reflecting layer pattern having a plurality of light-transmitting areas and a light-reflecting area defining the light-transmitting areas on a second face opposite to the first face of the base layer.
19. The method of claim 18 , further comprising removing a portion of the light-to-heat conversion layer corresponding to the light-reflecting area to form in the light-to-heat conversion layer a pattern corresponding to the light-transmitting areas.
20. The method of claim 18 , wherein forming the light-reflecting layer pattern comprises:
forming a first thin film facing the second face of the base layer and having a first optical refractive index; and
forming a second thin film having a second optical refractive index smaller than the first optical refractive index on the first thin film.
21. The method of claim 20 , further comprising forming an opening through the first thin film and the second thin film corresponding to the light-transmitting area.
22. A method of manufacturing organic electroluminescent element, the method comprising:
providing an array substrate in which a plurality of first electrodes is exposed;
providing a transfer substrate, the transfer substrate comprising a light-reflecting layer pattern having a plurality of light-transmitting areas and a light-reflecting area defining the light-transmitting areas, the light-reflecting layer pattern being disposed on a base layer, the light-reflecting area having reflectivity that is higher than reflectivity of the base layer, the transfer substrate further comprising a light-to-heat conversion layer disposed corresponding to the light-transmitting areas, the transfer substrate further comprising a transfer layer formed on the light-to-heat conversion layer;
disposing the transfer substrate relative to the array substrate so that the light-transmitting areas correspond to the first electrodes;
irradiating light onto the transfer substrate to transfer portions of the transfer layer onto the first electrodes, the light passing through the base layer, a first portion of the light being incident onto the light-transmitting areas, a second portion of the light being reflected by the light-reflecting area;
removing the transfer substrate from the array substrate; and
forming second electrodes on the portions of the transfer layer transferred onto the first electrodes.
23. The method of claim 22 , wherein
the portions of the transfer layer are transferred onto the first electrodes by using a line laser beam extending in a first direction to scan the light-reflecting layer pattern in a second direction crossing the first direction, and
the portions of the transfer layer overlap the light-to-heat conversion layer without overlapping the light-reflecting area.
24. The method of claim 23 , wherein the steps of disposing the transfer substrate relative to the array substrate, irradiating light onto the transfer substrate, and removing the transfer substrate are repeated for each transfer substrate in a set of transfer substrates to deposit a sequence of transfer layers onto first electrodes, wherein
the sequence of transfer layers includes a first organic emission layer having a first color, a second organic emission layer having a second color, and a third organic emission layer having a third color, portions of the first organic emission layer being transferred onto a first array of the first electrodes, portions of the second organic emission layer being transferred onto a second array of the first electrodes and portions of the third organic emission layer being transferred onto the a third array of the first electrodes.
25. The method of claim 23 , further comprising:
disposing an additional transfer substrate corresponding to a different area of the array substrate;
moving an irradiation apparatus irradiating the line laser beam over to the additional transfer substrate so as not to deviate from the array substrate; and
irradiating the line laser beam onto the additional transfer substrate to transfer portions of a transfer layer of the additional transfer substrate onto the first electrodes.