Methods of forming field effect transistors having silicided source/drain contacts with low contact resistance
View Patent ↗Methods of forming integrated circuit devices according to embodiments of the present invention include forming a PMOS transistor having P-type source and drain regions, in a semiconductor substrate, and then forming a diffusion barrier layer on the source and drain regions. A silicon nitride layer is deposited on at least portions of the diffusion barrier layer that extend opposite the source and drain regions. Hydrogen is removed from the deposited silicon nitride layer by exposing the silicon nitride layer to ultraviolet (UV) radiation. This removal of hydrogen may operate to increase a tensile stress in a channel region of the field effect transistor. This UV radiation step may be followed by patterning the first and second silicon nitride layers to expose the source and drain regions and then forming silicide contact layers directly on the exposed source and drain regions.
1. A method of forming an integrated circuit device, comprising:
forming a field effect transistor having P-type source and drain regions, in a semiconductor substrate;
forming a diffusion barrier layer on the source and drain regions, said diffusion barrier layer comprising a material that inhibits out-diffusion of dopants from the source and drain regions; then
forming a silicon nitride layer having a concentration of hydrogen therein on at least first and second portions of the diffusion barrier layer, said first and second portions extending between the source and drain regions and the silicon nitride layer; and
removing hydrogen from the silicon nitride layer by exposing the silicon nitride layer to ultraviolet radiation.
2. The method of claim 1 , wherein forming a diffusion barrier layer comprises forming a first silicon nitride layer having a first concentration of hydrogen therein, on the source and drain regions; and wherein forming a silicon nitride layer on at least portions of the diffusion barrier layer comprises forming a second silicon nitride layer having a second concentration of hydrogen therein that is greater than the first concentration, on the first silicon nitride layer.
3. The method of claim 2 , wherein the first silicon nitride layer has a thickness in a range from about 50 Å to about 300 Å.
4. The method of claim 3 , wherein the second silicon nitride layer has a thickness in a range from about 100 Å to about 1000 Å.
5. The method of claim 2 , wherein forming a first silicon nitride layer having a first concentration of hydrogen therein comprises depositing the first silicon nitride layer in a first ambient comprising SiH 4 , NH 3 and N 2 ; and wherein a ratio of SiH 4 /N 2 in the first ambient is less than 0.01.
6. The method of claim 5 , wherein a ratio of NH 3 /N 2 in the first ambient is less than 0.01.
7. The method of claim 2 , wherein forming a first silicon nitride layer having a first concentration of hydrogen therein comprises depositing the first silicon nitride layer in a first ambient comprising SiH 4 , NH 3 and N 2 ; and wherein a ratio of NH 3 /N 2 in the first ambient is less than 0.01.
8. The method of claim 5 , wherein forming a second silicon nitride layer having a second concentration of hydrogen therein comprises depositing the second silicon nitride layer in a second ambient comprising SiH 4 , NH 3 and N 2 ; and wherein a ratio of SiH 4 /N 2 in the second ambient is greater than 0.01.
9. The method of claim 8 , wherein a ratio of NH 3 /N 2 in the second ambient is greater than 0.1.
10. The method of claim 6 , wherein forming a second silicon nitride layer having a second concentration of hydrogen therein comprises depositing the second silicon nitride layer in a second ambient comprising SiH 4 , NH 3 and N 2 ; and wherein a ratio of SiH 4 /N 2 in the second ambient is greater than 0.01.
11. The method of claim 10 , wherein a ratio of NH 3 /N 2 in the second ambient is greater than 0.1.
12. The method of claim 2 , wherein said removing is followed by:
patterning the first and second silicon nitride layers to expose the source and drain regions; and
forming silicide contact layers directly on the source and drain regions.