IP Library Granted Patent US 8,064,071
Granted Patent B2
US 8,064,071 · App. 12/403,200 · Granted Nov 22, 2011

Floating sheet measurement apparatus and method

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Quick Facts
Patent No.
US 8,064,071
App. No.
12/403,200
Granted
Nov 22, 2011
Kind
B2
Abstract

A sheet measurement apparatus has a sheet disposed in a melt. The measurement system uses a beam to determine a dimension of the sheet. This dimension may be, for example, height or width. The beam may be, for example, collimated light, a laser, x-rays, or gamma rays. The production of the sheet may be altered based on the measurements.

Claims (34)

1. A sheet measurement apparatus comprising:

a melt of a material;

a sheet of said material that floats on a surface of said melt;

a pump configured to cause said melt to flow;

a cooling plate configured to use radiation cooling disposed a distance from said sheet; and

a measurement system that uses a beam to determine a dimension of said sheet.

2. The sheet measurement apparatus of claim 1 , wherein said beam is selected from the group consisting of collimated light, a laser, and x-rays.

3. The sheet measurement apparatus of claim 1 , wherein said beam is a gamma ray.

4. The sheet measurement apparatus of claim 1 , wherein said dimension is selected from the group consisting of height and width.

5. The sheet measurement apparatus of claim 1 , wherein said measurement system comprises a plurality of measurement units.

6. The sheet measurement apparatus of claim 1 , wherein said measurement system comprises at least one measurement unit, said measurement unit configured to determine a height of said sheet above a surface of said melt.

7. The sheet measurement apparatus of claim 6 , further comprising a control system, said control system configured to calculate a total height of said sheet based on said height of said sheet above said surface of said melt, a density of said sheet, and a density of said melt.

8. The sheet measurement apparatus of claim 1 , wherein said material comprises silicon or silicon and germanium.

9. A sheet measurement method comprising:

freezing a sheet of a material in a melt of said material by radiation cooling;

transporting said sheet floating on a surface of said melt wherein said sheet and said melt flow at approximately an equal speed; and

measuring a width of said sheet across said melt using a beam.

10. The sheet measurement method of claim 9 , wherein said beam is selected from the group consisting of collimated light, a laser, and x-rays.

11. The sheet measurement method of claim 9 , wherein said beam is a gamma ray.

12. The sheet measurement method of claim 9 , wherein said dimension width of said sheet is measured over time.

13. The sheet measurement method of claim 9 , wherein said measuring determines a gowth rate of said sheet.

14. The sheet measurement method of claim 9 , further comprising monitoring a consistency of said width over time.

15. The sheet measurement method of claim 9 , further comprising adjusting a parameter of said freezing or said transporting based on said measuring.

16. The sheet measurement method of claim 9 , further comprising adjusting a parameter of said freezing or said transporting using a feedback loop.

17. A sheet measurement method comprising:

flowing a melt of a material through a channel;

cooling said melt by radiation cooling;

forming a sheet of said material that floats on a surface of said melt;

flowing said sheet and said melt;

measuring a height of said sheet above said surface of said melt using a beam with a first intensity, wherein a first portion of said beam is completely blocked by said sheet and a second portion of said beam not blocked by said sheet is used for said measuring, wherein said second portion has said first intensity and is projected above a surface of said sheet; and

separating said sheet from said melt.

18. The sheet measurement method of claim 17 , further comprising calculating a total height of said sheet based on said height of said sheet above said surface of said melt, a density of said sheet, and a density of said melt.

19. The sheet measurement method of claim 17 , wherein said height of said sheet is measured over time.

20. The sheet measurement method of claim 17 , further comprising adjusting a parameter of said cooling or said flowing based on said measuring.

Assignments (6)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Mar 20, 2025
From: BLUE ORIGIN, LLC
To: BLUE ORIGIN MANUFACTURING, LLC
Reel/Frame 070585/0314 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Sep 16, 2024
From: LEADING EDGE EQUIPMENT TECHNOLOGIES, INC.
To: BLUE ORIGIN, LLC
Reel/Frame 068601/0041 →
CHANGE OF NAME Recorded Dec 1, 2021
From: LEADING EDGE CRYSTAL TECHNOLOGIES, INC.
To: LEADING EDGE EQUIPMENT TECHNOLOGIES, INC.
Reel/Frame 058292/0241 →
ACQUISITION Recorded Jan 15, 2020
From: VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC.
To: APPLIED MATERIALS, INC.
Reel/Frame 051973/0106 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Dec 11, 2019
From: APPLIED MATERIALS, INC.
To: LEADING EDGE CRYSTAL TECHNOLOGIES, INC.
Reel/Frame 051247/0716 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Mar 12, 2009
From: ROWLAND, CHRISTOPHER A.; KELLERMAN, PETER L.; SINCLAIR, FRAML; BLAKE, JULIAN G.; BATEMAN, NICHOLAS P.T.
To: VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC.
Reel/Frame 022387/0346 →