Piezoelectric device and electronic apparatus
View Patent ↗A piezoelectric device includes an integrated circuit (IC) chip and a piezoelectric resonator element, a part of the piezoelectric resonator element being disposed so as to overlap with a part of the IC chip when viewed in plan. The IC chip includes: an inner pad disposed on an active face and in an area where is overlapped with the piezoelectric resonator when viewed in plan; an insulating layer formed on the active face; a relocation pad disposed on the insulating layer and in an area other than a part where is overlapped with the piezoelectric resonator element, the relocation pad being coupled to an end part of a first wire; and a second wire electrically coupling the inner pad and the relocation pad, the second wire having a relocation wire and a connector that penetrates the insulating layer, the relocation wire being disposed between the insulating layer and the active face.
1. A piezoelectric device comprising:
a package body including a cavity;
an integrated circuit chip disposed on the cavity; and
a piezoelectric resonator element, at least a part of the piezoelectric resonator element being disposed so as to overlap with a part of the integrated circuit chip in plan view, wherein the integrated circuit chip includes:
an inner pad disposed on an active face of the integrated circuit chip and in an area where the integrated circuit chip is overlapped with the piezoelectric resonator in plan view;
an insulating layer formed on the active face;
a relocation pad disposed on the insulating layer and in a second area other than the area where the integrated circuit chip is overlapped with the piezoelectric resonator element in plan view, the relocation pad being coupled to an end part of a first wire; and
a second electrical terminal electrically coupling the inner pad and the relocation pad.
2. The piezoelectric device according to claim 1 , the relocation pad being disposed adjacent to at least one side of a peripheral part of the integrated circuit chip.
3. The piezoelectric device according to claim 1 , further comprising a mount electrode being provided on the insulating layer, and the piezoelectric resonator element being mounted on the mount electrode.
4. The piezoelectric device according to claim 1 , further comprising a frequency adjustor element adjusting oscillation frequency and being coupled to the relocation wire.
5. An electronic apparatus comprising:
a piezoelectric device, wherein the piezoelectric device comprising:
a package body including a cavity;
an integrated circuit chip disposed on the cavity; and
a piezoelectric resonator element, at least a part of the piezoelectric resonator element being disposed so as to overlap with a part of the integrated circuit chip in plan view, wherein the integrated circuit chip includes:
an inner pad disposed on an active face of the integrated circuit chip and in an area where the integrated circuit chip is overlapped with the piezoelectric resonator in plan view;
an insulating layer formed on the active face;
a relocation pad disposed on the insulating layer and in a second area other than the area where the integrated circuit chip is overlapped with the piezoelectric resonator element in plan view, the relocation pad being coupled to an end part of a first wire; and
a second electrical terminal electrically coupling the inner pad and the relocation pad.