Ink jet recording head, manufacturing method thereof, and electron device

1. An ink jet recording head comprising:

a substrate, having a front surface and a back surface opposite from the front surface, provided above the front surface with an energy generating element for generating energy used for ejecting ink;

an ink supply port provided so as to penetrate between the front surface and the back surface of said substrate;

a first layer provided on or above the front surface of said substrate;

a protection layer which is provided so as to coat a wall of said substrate defining said ink supply port and which continuously extends onto said first layer; and

a second layer located above the front surface of said substrate and including a portion provided on said protection layer and another portion provided on said first layer by penetrating through said protection layer.

2. A head according to claim 1 , wherein said protection layer is formed of a material selected from the group consisting of polyparaxylylene, polyimide, and polyurea.

3. A head according to claim 1 , wherein said first layer is formed of silicon oxide and said second layer is formed of silicon oxide.

4. A head according to claim 2 , wherein said first layer is formed of silicon oxide and said second layer is formed of silicon oxide.