Method for producing perovskite-structure oxide
View Patent ↗The present invention provides a method for producing a perovskite-structure oxide, with which a highly crystalline oxide layer is formed on a base layer that is metal or the like. The method comprises the steps of: forming, on a base layer, a buffer layer having thermal conductivity lower than thermal conductivity of the base layer; forming a precursor layer of an ABO 3 -type perovskite-structure oxide comprising Ba at A sites thereof and Ti at B sites thereof on the buffer layer; decomposing the precursor layer, thereby forming an oxide layer comprising Ba and Ti; and annealing the oxide layer by irradiating laser light thereon.
1. A method for producing a perovskite-structure oxide, comprising the steps of:
forming, on a base layer, a buffer layer of ZnO, the buffer layer having a thermal conductivity lower than a thermal conductivity of the base layer;
forming a precursor layer of an ABO 3 -type perovskite-structure oxide comprising Ba at A sites thereof and Ti at B sites thereof directly on the buffer layer, the precursor containing a metal organic acid salt or a metal acetate;
decomposing the precursor layer of the ABO 3 -type perovskite-structure oxide, thereby forming an oxide layer; and
annealing the oxide layer by irradiating pulsed ultraviolet laser light thereon, the oxide layer being kept at 0 to 400° C. during the annealing.
2. The method for producing a perovskite-structure oxide according to claim 1 , wherein the base layer is a metal layer or an alloy layer.
3. The method for producing a perovskite-structure oxide according to claim 1 , wherein the base layer is a Cu layer, an Ag layer, an Au layer or an Al layer.
4. The method for producing a perovskite-structure oxide according to claim 1 , wherein the annealing step is performed in an oxygen-containing atmosphere.
5. The method for producing a perovskite-structure oxide according to claim 4 , wherein the oxygen-containing atmosphere is air.