Surface acoustic wave device and method of fabricating the same
View Patent ↗A surface acoustic wave device includes a piezoelectric substrate, an interdigital transducer (IDT) formed on the piezoelectric substrate, an interconnection electrode that is provided on the piezoelectric substrate and is connected to the IDT, the IDT being made of a metal identical to that of the IDT, an inorganic insulation layer that is provided on the piezoelectric substrate so that at least the interconnection electrode is exposed, an insulative resin layer that is located on an interface between the inorganic insulation layer and a portion of the interconnection electrode exposed from the inorganic insulation layer and is formed so as to cover a side surface of the interconnection electrode, and a metal layer that is provided on the interconnection electrode and the insulative resin layer.
1. A surface acoustic wave device comprising:
a piezoelectric substrate;
an interdigital transducer (IDT) formed on the piezoelectric substrate;
an interconnection electrode that is provided on the piezoelectric substrate, is connected to the IDT, and is made of a metal identical to that of the IDT;
an inorganic insulation layer that is provided on the piezoelectric substrate so that at least the interconnection electrode is exposed;
an insulative resin layer that is located on an interface between the inorganic insulation layer and a portion of the interconnection electrode exposed from the inorganic insulation layer and is formed so as to cover a side surface of the interconnection electrode; and
a metal layer that is provided on the interconnection electrode and the insulative resin layer.
2. The surface acoustic wave device according to claim 1 , wherein the insulative resin layer has an end that has a forward tapered portion.
3. The surface acoustic wave device according to claim 1 , wherein the inorganic insulation layer is provided so as to overlap the interconnection electrode.
4. The surface acoustic wave device according to claim 1 , wherein the insulative resin layer includes photosensitive resin.
5. The surface acoustic wave device according to claim 1 , wherein the insulative resin layer is photosensitive polyimide.
6. The surface acoustic wave device according to claim 1 , wherein the IDT and the interconnection electrodes comprises Al or an alloy of Al—Cu.
7. The surface acoustic wave device according to claim 1 , wherein the metal layer includes a titanium layer contacting the interconnection electrode, and a gold layer provided on the titanium layer.
8. A method of fabricating a surface acoustic wave device comprising:
forming an interdigital transducer (IDT) and an interconnection electrode connected thereto on a piezoelectric substrate, the IDT and the interconnection electrode being made of an identical metal;
forming an inorganic insulation layer on the piezoelectric substrate so that at least the interconnection electrode is exposed;
forming an insulative resin layer on an interface between the inorganic insulation layer and a part of the interconnection electrode exposed from the inorganic insulation layer; and
forming a metal layer on the interconnection electrode and the insulative resin layer.
9. The method according to claim 8 , wherein forming the insulative resin layer includes forming the insulative resin layer so as to forwardly taper an end of the insulative resin layer.
10. The method according to claim 8 , wherein forming the inorganic insulation layer includes forming the inorganic insulation layer so that the inorganic insulation layer overlaps the interconnection electrode.
11. The method according to claim 8 , wherein forming the insulative resin layer includes shaping photosensitive resin by a photolithographic process, and annealing the photosensitive resin.
12. The method according to claim 11 , wherein annealing the photosensitive resin applies heat to opposite surfaces of the piezoelectric substrate, one of which has the IDT.