Acceleration sensing device
View Patent ↗An acceleration sensing device includes: an outer frame; a first drive arm having both ends supported by sides of the outer frame through respective base parts, the sides opposing each other; a second drive arm extending from one of the base parts of at least one of the sides toward the other side; and a sensing arm that is disposed midway between the first drive arm and the second drive arm and extends form the one base part of the one side toward the other side, the sensing arm having an electrode in order to extract electric charge generated in the sensing arm. In the device, the first drive arm and the second drive arm have excitation electrodes for a flexural vibration and form a tuning fork type resonator, and center positions in thicknesses of sections that are located in the base parts and on an extension line of the first drive arm differ from a center position in a thickness of the first drive arm.
1. An acceleration sensing device, comprising:
an outer frame;
a first drive arm having both ends supported by sides of the outer frame through respective base parts, the sides opposing each other;
a second drive arm extending from one of the base parts of at least one of the sides toward the other side; and
a sensing arm that is disposed midway between the first drive arm and the second drive arm and extends from the one base part of the one side toward the other side, the sensing arm having an electrode in order to extract electric charge generated in the sensing arm,
wherein:
the first drive arm and the second drive arm have excitation electrodes for a flexural vibration and form a tuning fork type resonator; and
center positions in thicknesses of sections that are located in the base parts and on an extension line of the first drive arm differ from a center position in a thickness of the first drive arm,
the outer frame having a first narrowed section and a second narrowed section, the second narrowed section being disposed at a position remote from the first narrowed section with an opening of the outer frame interposed between the first and the second narrowed sections and in a direction orthogonal to an extended direction of the first drive arm.
2. The acceleration sensing device according to claim 1 , wherein:
both ends of the second drive arm are supported by the opposing sides of the outer frame through the respective base parts, and center position in thicknesses of sections that are of the base parts located in the base parts and on an extension line of the second drive arm differ from a center position in a thickness of the second drive arm; and
the center positions in the thicknesses of the sections of the first drive arm differ from the center positions in the thicknesses of the sections of the second drive arm.
3. The acceleration sensing device according to claim 1 , the base parts having a projecting shape being provided to inner edge parts of the opposing sides, both ends of the first and the second drive arms being integrally formed with the respective base parts, a base edge part of the sensing arm being integrally formed with the one base part, a first concave section and a second concave section being provided on one face of the base parts, and a third concave section and a fourth concave section being provided on other face of the base parts.
4. The acceleration sensing device according to claim 1 , the excitation electrodes disposed in the first and second drive arms being provided such that the first and the second drive arms are both excited in a mode of the flexural vibration but in an opposite phase each other.