Apparatus for detecting particles on a glass surface and a method thereof
View Patent ↗The present invention relates to an apparatus for detecting particles on a glass surface and a method thereof, and more specifically, to an apparatus for detecting particles on a glass surface and a method thereof for exactly inspecting particles which may be created on a glass surface where micro circuits are deposited. The apparatus for detecting the particles on the glass surface in accordance with the present invention comprises laser beam irradiators for detecting particles on a glass substrate on upper and lower sides of the glass substrate at certain intervals, respectively, and wherein the irradiators are configured so that beams emitted from the laser beam irradiators can be irradiated in a direction vertical to a transferring direction of the glass substrate, thereby exactly detecting particles detached to the glass surface without exception.
1. A glass surface particle detecting apparatus for detecting particles existing on a surface of glass which is being transferred, comprising:
an upper laser beam irradiator for irradiating a laser beam on an upper surface of glass in a first direction perpendicular to a second direction in which a glass substrate moves, wherein the laser beam is irradiated from one upper side of the glass substrate to other upper side of the glass substrate;
an upper detection camera for receiving a beam diffused by particles after the laser beam irradiated in the upper laser beam irradiator is irradiated on an upper side of the glass substrate; and
a detection signal processor for deciding whether the particles exist on the glass substrate by analyzing an image signal outputted from the upper detection camera.
2. The apparatus of claim 1 , wherein the upper laser beam is diagonally incident as forming an inclination angle of 0.06° to 6° from the upper side of the glass substrate.
3. The apparatus of claim 1 , wherein the upper laser beam and the lower laser beam have width (φ) defined in thickness direction of the glass substrate and thickness (T) defined in transferring direction of the glass substrate, and the laser beam is in oblong shape whose width (φ) is larger than thickness (T).
4. The apparatus of claim 1 , the apparatus, further comprising:
a lower laser beam irradiator for irradiating a laser beam on an lower surface of glass in the first direction perpendicular to the second direction in which the glass substrate moves, wherein the laser beam is irradiated from one lower side of the glass substrate to other lower side of the glass substrate;
a lower detection camera for receiving a beam diffused by particles after the laser beam irradiated in the lower laser beam irradiator is irradiated on a lower side of the glass substrate; and wherein
the detection signal processor decides on positions of the particles on the glass substrate by analyzing image signals outputted from the upper detection camera and the lower detection camera.
5. The apparatus of claim 4 , wherein the detection signal processor provides particle-display screens that visually display information on the particles attached to the upper side or the lower side, based on the image signals inputted from the upper detection camera and the lower detection camera.
6. The apparatus of claim 4 , wherein the upper laser beam is diagonally incident as forming an inclination angle of 0.06° to 6° from the upper side of the glass substrate.
7. The apparatus of claim 4 , wherein the lower laser beam is diagonally incident as forming an inclination angle of 0.06° to 6° from the lower side of the glass substrate.
8. The apparatus of claim 4 , wherein the upper laser beam and the lower laser beam have width (φ) defined in thickness direction of the glass substrate and thickness (T) defined in transferring direction of the glass substrate, and the laser beam is in oblong shape whose width (φ) is larger than thickness (T).
9. A glass surface's particle detecting method for detecting particles existing on a surface of glass which is being transferred, comprising the steps of:
a first step of irradiating a laser beam on an upper surface of glass in a first direction perpendicular to a second direction in which a glass substrate moves, wherein the laser beam is irradiated from one upper side of the glass substrate to other upper side of the glass substrate;
a second step of receiving a beam diffused by particles after the laser beam irradiated in the first step is irradiated on the upper surface of the glass substrate; and
a third step of deciding whether the particles exist on the glass substrate by analyzing an image signal outputted in the second step.
10. The method of claim 9 , the method, further comprising the steps of:
a fourth step of irradiating a laser beam on a lower surface of glass in a first direction perpendicular to a second direction in which the glass substrate moves, wherein the laser beam is irradiated from one lower side of the glass substrate to other lower side of the glass substrate;
a fifth step of receiving a beam diffused by particles after the laser beam irradiated in the fourth step is irradiated on the lower surface of the glass substrate; and wherein
in the third step, it is decided whether the particles detected by analyzing image signals outputted in the second step and the fifth step are attached to the upper surface or the lower surface of the glass substrate.
11. A glass surface's particle detecting method for detecting whether particles existing on a surface of glass which is being transferred are attached to an upper side or a lower side of a glass substrate, comprising the steps of:
a first step of irradiating a laser beam on an upper surface of glass in a first direction perpendicular to a second direction in which a glass substrate moves, wherein the laser beam is irradiated from one upper side of the glass substrate to other upper side of the glass substrate, and receiving a beam diffused by the particles to output the beam as a video image; and
a second step of irradiating a laser beam on a lower surface of glass in a first direction perpendicular to a second direction in which the glass substrate moves, wherein the laser beam is irradiated from one lower side of the glass substrate to other lower side of the glass substrate, and receiving a beam diffused by the particles to output the beam as a video image.