Solid-state image sensor, manufacturing method for solid-state image sensor, and camera
View Patent ↗A solid-state image sensor includes a plurality of light-receiving elements arranged in a light-receiving area, and a plurality of micro-lenses corresponding to the light-receiving elements, and has a flattening film formed on the plurality of the micro-lenses. At a center of the light-receiving area, the micro-lenses are placed in positions directly above corresponding photodiodes, and placed in positions which are progressively offset from positions directly above the corresponding photodiodes, towards a center of the light receiving area, as micro-lenses are located farther from the center of the light-receiving area.
1. A method of manufacturing a solid-state image sensor, comprising:
forming light-receiving elements in a light-receiving area;
forming micro-lenses corresponding to the light-receiving elements;
forming a transparent film on the micro-lenses for moderating an incidence angle of oblique light, entering the solid-state image sensor from above the solid-state image sensor, at a periphery of the light-receiving area; and
arranging the light-receiving elements, the micro-lenses, and the transparent film such that, in a central portion of the light-receiving area, a corresponding one of the micro-lenses is directly above a corresponding one of the light-receiving elements, and in a portion of the light-receiving area that is closer to the periphery of the light-receiving area than a center of the light-receiving area, corresponding ones of the micro-lenses are offset from directly above corresponding ones of the light-receiving elements, the micro-lenses being arranged to collect the light of which the incidence angle has been moderated by the transparent film.
2. The method of claim 1 , wherein said forming of the transparent film is such that a refractive index of the transparent film is less than a refractive index of the micro-lenses.
3. The method of claim 2 , wherein the solid-state image sensor is a CCD-type image sensor.
4. The method of claim 2 , wherein the solid-state image sensor is an MOS-type image sensor.
5. The method of claim 1 , wherein the solid-state image sensor is a CCD-type image sensor.
6. The method of claim 1 , wherein the solid-state image sensor is an MOS-type image sensor.
7. The method of claim 1 , further comprising forming color filters between the light-receiving elements and the micro-lenses.
8. The method of claim 7 , wherein said forming the color filters is such that each of the color filters has a convex shape.
9. The method of claim 7 , wherein said forming the transparent film is such that a refractive index of the transparent film is between 1.4 to 1.5 inclusive.
10. The method of claim 7 , wherein said forming the micro lenses is such that a refractive index of the micro lenses is between 1.6 to 1.7 inclusive.
11. The method of claim 9 , wherein said forming the transparent film is such that a refractive index of the transparent film is between 1.4 to 1.5 inclusive.
12. The method of claim 1 , wherein said forming the transparent film is such that the transparent film is formed to fill-in spaces between the micro-lenses that are adjacent to one another.
13. The method of claim 12 , wherein said forming the micro lenses is such that a refractive index of the micro lenses is between 1.6 to 1.7 inclusive.
14. The method of claim 13 , wherein said forming the transparent film is such that a refractive index of the transparent film is between 1.4 to 1.5 inclusive.
15. The method of claim 12 , wherein said forming the transparent film is such that a refractive index of the transparent film is between 1.4 to 1.5 inclusive.
16. The method of claim 1 , further comprising:
forming color filters corresponding to the light-receiving elements; and
arranging the color filters such that, in the portion of the light-receiving area that is closer to the periphery of the light-receiving area than the center of the light-receiving area, corresponding ones of the color filters are offset from directly above corresponding ones of the light-receiving elements towards the center of the light-receiving area.
17. The method of claim 16 , wherein said arranging of the color filters is such that an amount of offset of each of the corresponding ones of the micro-lenses is greater than an amount of offset of a respective one of the corresponding ones of the color filters.
18. The method of claim 1 , wherein said arranging of the light-receiving elements, the micro-lenses, and the transparent film is such that a distance from one of the light-receiving elements to a bottom of a corresponding one of the micro-lenses is between 3 μm to 5 μm inclusive.
19. The method of claim 1 , wherein said forming of the micro lenses is such that a refractive index of the micro lenses is between 1.6 to 1.7 inclusive.
20. The method of claim 19 , wherein said forming of the transparent film is such that a refractive index of the transparent film is between 1.4 to 1.5 inclusive.
21. The method of claim 1 , wherein said forming of the transparent film is such that a refractive index of the transparent film is between 1.4 to 1.5 inclusive.
22. The method of claim 1 , wherein the micro-lenses also serve as color filters.