Method and system for packaging a MEMS device
View Patent ↗A MEMS-based display device is described, wherein an array of interferometric modulators are configured to reflect light through a transparent substrate. The transparent substrate is sealed to a backplate and the backplate can contain electronic circuitry for controlling the array of interferometric modulators. The backplate can provide physical support for device components, such as electronic components which can be used to control the state of the display. The backplate can also be utilized as a primary structural support for the device.
1. A display device, comprising:
an array of interferometric modulators disposed on a first surface of a transparent substrate;
a carrier comprising a first surface and a second surface, wherein a first surface of the carrier is sealed to said transparent substrate to form a package encapsulating the interferometric modulator array; and
an outer device shell, wherein the carrier is disposed within the outer device shell, wherein a rear portion of the outer device shell is disposed on the opposite side of the carrier from the transparent substrate, wherein the rear portion of the outer device shell extends beyond the edges of the second surface of the carrier, and wherein the rigidity of the carrier is greater than the rigidity of the outer device shell.
2. The display device of claim 1 , wherein the carrier comprises a material configured to inhibit vapor transmission into the package.
3. The display device of claim 1 , wherein the carrier comprises an antenna.
4. A display device, comprising:
a carrier, said carrier comprising a first surface;
a transparent substrate, wherein a first surface of the transparent substrate is sealed to the first surface of the carrier to form a sealed package, and wherein a surface area of the first surface of the carrier is larger than a surface area of the first surface of the substrate, such that a portion of the first surface of the carrier is laterally displaced offset from the transparent substrate;
an array of interferometric modulators disposed on said transparent substrate and sealed within said package; and
a keyboard disposed on said laterally displaced portion of said first surface of the carrier.
5. The display device of claim 4 , wherein the display device comprises a telephone.
6. The display device of claim 4 , wherein the carrier comprises a vapor transmission barrier.
7. The display device of claim 4 , wherein the carrier comprises an antenna.
8. The display device of claim 4 , wherein the laterally displaced portion of the first surface of the carrier is located outside of the sealed package.
9. A display device, comprising:
an array of interferometric modulators disposed on a first surface of a transparent substrate;
a carrier, wherein a first surface of said carrier is sealed to said first surface of the transparent substrate to form a package encapsulating the interferometric modulator array, wherein a surface area of the first surface of the carrier is larger than a surface area of the first surface of the transparent substrate;
an ancillary device component, wherein said ancillary device component is disposed on a second surface of said carrier, and wherein the carrier comprises electrical feedthroughs extending through the carrier; and
a keyboard supported by the first surface of the carrier.
10. The display device of claim 9 , wherein the ancillary device component comprises driver circuitry.
11. A display device, comprising:
an array of interferometric modulators disposed on a first surface of a transparent substrate;
a carrier, wherein a first surface of said carrier is sealed to said first surface of the transparent substrate to form a package encapsulating the interferometric modulator array, wherein a surface area of the first surface of the carrier is larger than a surface area of the first surface of the transparent substrate;
an ancillary device component, wherein said ancilarry device component is disposed on a second surface of said carrier, and wherein the carrier comprises electrical feedthroughs extending through the carrier; and
a microphone supported by the first surface of the carrier.
12. The display device of claim 11 , wherein the ancillary device component comprises driver circuitry.