IP Library Granted Patent US 8,192,788
Granted Patent B1
US 8,192,788 · App. 12/426,084 · Granted Jun 5, 2012

Single step current collector deposition process for energy storage devices

Assignee: Enovix Corporation
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Quick Facts
Patent No.
US 8,192,788
App. No.
12/426,084
Granted
Jun 5, 2012
Kind
B1
Abstract

The present invention is directed to methods of forming current collectors of an energy storage device. The current collectors can be formed either before forming the anode/cathode, or after forming the anode/cathode. In one embodiment, a current collector material is simultaneously deposited on an anode support structure and a cathode support structure to form an anode current collector and a cathode current collector. In another embodiment, a current collector material is simultaneously deposited on an anode and a cathode to form an anode current collector and a cathode current collector.

Claims (25)

1. A method of forming current collectors of an energy storage device comprising:

forming an anode current collector and a cathode current collector that are electrically isolated from each other, the forming of the anode current collector and cathode current collector comprising (i) simultaneously depositing a current collector material on an anode support structure and on a cathode support structure to form the anode current collector and the cathode current collector, respectively, the anode support structure and the cathode support structure each extending from a substrate surface and each having an actual surface area that is greater than twice its geometrical surface area, and (ii) removing deposited current collector material, as necessary, after said simultaneous deposition step to electrically isolate the anode current collector from the cathode current collector.

2. The method of claim 1 , wherein the current collector material is deposited on the anode support structure and on the cathode support structure by electrochemical deposition, electroless deposition, electrophoretic deposition, displacement deposition, or chemical vapor deposition.

3. The method of claim 1 , wherein the current collector material is deposited on the anode support structure and on the cathode support structure by a printing technique or sputter deposition.

4. The method of claim 1 , further comprising sintering the current collector material.

5. The method of claim 1 , further comprising selectively etching the current collector material to electrically isolate the anode current collector from the cathode current collector.

6. The method of claim 1 , further comprising pyrolyzing the current collector material.

7. The method of claim 1 wherein the method further comprises the step of forming an anode on the anode support structure and a cathode on the cathode support structure, and the current collector material is simultaneously deposited on the anode support structure and the cathode support structure by simultaneously depositing the current collector material onto the anode and the cathode formed on the anode support structure and cathode support structure, respectively.

8. The method of claim 7 , wherein the current collector material comprises carbon, nickel or platinum.

9. The method of claim 7 , wherein the current collector material is deposited on the anode and on the cathode by electrochemical deposition, electroless deposition, electrophoretic deposition, displacement deposition, or chemical vapor deposition.

10. The method of claim 7 , wherein the current collector material is deposited on the anode and on the cathode by a printing technique or sputter deposition.

11. The method of claim 7 , further comprising sintering the current collector material.

12. The method of claim 7 , further comprising selectively etching the current collector material to electrically isolate the anode current collector from the cathode current collector.

13. The method of claim 7 , further comprising pyrolyzing the current collector material.

14. The method of claim 7 , wherein the current collector material comprises parylene.

15. The method of claim 6 , wherein the current collector material comprises parylene.

16. The method of claim 1 wherein the deposited current collector material comprises carbon, nickel, platinum, titanium or tantalum.

17. The method of claim 1 wherein the deposited current collector material is alloyed or reacted with the anode, cathode, anode support structure or cathode support structure.

18. The method of claim 1 wherein the anode, cathode, anode support structure or cathode support structure comprises a semiconductor material and the deposited current collector material is alloyed with the semiconductor material.

19. The method of claim 18 wherein the deposited current collector material is nickel.

20. The method of claim 1 wherein the current collector material is simultaneously deposited onto the anode support structure to form an anode current collector and on the cathode support structure to form a cathode current collector, and an anode is formed on the anode current collector and a cathode is formed on the cathode current collector.

21. The method of claim 20 wherein the deposited current collector material comprises carbon, nickel, platinum, titanium or tantalum.

22. The method of claim 20 wherein the deposited current collector material is alloyed or reacted with the anode support structure or the cathode support structure.

23. The method of claim 20 wherein the current collector material is deposited on the anode support structure and on the cathode support structure by electrochemical deposition, electroless deposition, electrophoretic deposition, displacement deposition, or chemical vapor deposition.

24. The method of claim 20 further comprising sintering the current collector material.

Assignments (7)
MERGER AND CHANGE OF NAME Recorded Jan 19, 2023
From: ENOVIX OPERATIONS INC.; ENOVIX CORPORATION
To: ENOVIX CORPORATION
Reel/Frame 062434/0809 →
MERGER AND CHANGE OF NAME Recorded Jan 5, 2022
From: RSVAC MERGER SUB INC.; ENOVIX CORPORATION; ENOVIX OPERATIONS INC.
To: ENOVIX OPERATIONS INC.
Reel/Frame 058646/0894 →
TERMINATION OF SECURED OPTION AGREEMENT Recorded Feb 5, 2021
From: YORK DISTRESSED ESSET FUND III, L.P.; RODGERS MASSEY REVOCABLE LIVING TRUST DTD 4/4/11, THURMAN JOHN RODGERS, TRUSTEE; PETRICK, MICHAEL; EDDY ZERVIGON REVOCABLE TRUST U/A DATED FEBRUARY 16, 2010 - EDDY ZERVIGON AS TRUSTEE; SABOUNGHI, EDGAR; GCHINVESTMENTS,LLC; SHERMAN, JOEL, DR.; THE OBERST FAMILY TRUST, DATED 12/7/2005; GREENBERGER, MARC; JEROME INVESTMENTS, LLC; MCGOVERN, BRIAN; DPIP PROJECT LION SERIES; TUNE HOUSE CAPITAL I LLC; DCM V, L.P.
To: ENOVIX CORPORATION
Reel/Frame 055229/0544 →
SECOND AMENDMENT TO SECURED OPTION AGREEMENT Recorded Jan 7, 2019
From: ENOVIX CORPORATION
To: YORK DISTRESSED ASSET FUND III, L.P.; RODGERS MASSEY REVOCABLE LIVING TRUST DTD 4/4/11, THURMAN JOHN RODGERS, TRUSTEE; MICHAEL PETRICK; EDDY ZERVIGON REVOCABLE TRUST U/A DATED FEBRUARY 16, 2010 - EDDY ZERVIGON AS TRUSTEE; EDGAR SABOUNGHI; GCH INVESTMENTS, LLC; DR. JOEL SHERMAN; THE OBERST FAMILY TRUST, DATED 12/7/2005; MARC GREENBERGER; JEROME INVESTMENTS, LLC; BRIAN MCGOVERN; DPIP PROJECT LION SERIES; TUNE HOUSE CAPITAL I LLC; DCM V, L.P.
Reel/Frame 048432/0300 →
FIRST AMENDMENT TO SECURED OPTION AGREEMENT Recorded Dec 6, 2018
From: ENOVIX CORPORATION
To: YORK DISTRESSED ASSET FUND III, L.P.; RODGERS MASSEY REVOCABLE LIVING TRUST DTD 4/4/11, THURMAN JOHN RODGERS, TRUSTEE; PETRICK, MICHAEL; EDDY ZERVIGON REVOCABLE TRUST U/A DATED FEBRUARY 16, 2010 -EDDY ZERVIGON AS TRUSTEE; SABOUNGHI, EDGAR; GCH INVESTMENTS, LLC; SHERMAN, JOEL, DR.; THE OBERST FAMILY TRUST, DATED 12/7/2005; GREENBERGER, MARC; JEROME INVESTMENTS, LLC; MCGOVERN, BRIAN; DPIP PROJECT LION SERIES; TUNE HOUSE CAPITAL I LLC
Reel/Frame 047733/0685 →
SECURED OPTION AGREEMENT Recorded Oct 29, 2018
From: ENOVIX CORPORATION
To: YORK DISTRESSED ASSET FUND III, L.P.; RODGERS MASSEY REVOCABLE LIVING TRUST DTD 4/4/11, THURMAN JOHN RODGERS, TRUSTEE; PETRICK, MICHAEL; EDDY ZERVIGON REVOCABLE TRUST U/A DATED FEBRUARY 16, 2010 -EDDY ZERVIGON AS TRUSTEE; SABOUNGHI, EDGAR; GCH INVESTMENTS, LLC; SHERMAN, JOEL, DR.; THE OBERST FAMILY TRUST, DATED 12/7/2005; GREENBERGER, MARC; JEROME INVESTMENTS, LLC; MCGOVERN, BRIAN; DPIP PROJECT LION SERIES
Reel/Frame 047348/0007 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded May 28, 2010
From: SHAH, NIRAV S.; RAMASUBRAMANIAN, MURALI
To: ENOVIX CORPORATION
Reel/Frame 024455/0854 →
Continuity (1)
Provisional Application 61045879 · Apr 17, 2008