Elastic wave device and filter and electronic equipment using the device
View Patent ↗The elastic wave device of the present invention has an piezoelectric substrate; a first dielectric layer disposed on the piezoelectric substrate; a second dielectric layer disposed on the first dielectric layer; and an acoustical layer on the second dielectric layer. Determining each film thickness of the first and the second dielectric layers provides advantageous effects. That is, energy of an SH wave as a main wave is confined in the boundary between the piezoelectric substrate and the first dielectric layer, and at the same time, an SV wave is suppressed as an unwanted wave. The device allows the SV wave—whose displacement distribution is similar to that of Stoneley wave—to have displacement distribution on the upper surface of the second dielectric layer and to be suppressed by the acoustical layer disposed on the second dielectric layer.
1. An elastic wave device comprising:
a piezoelectric substrate;
an IDT electrode disposed on an upper side of the piezoelectric substrate;
a first dielectric layer made of silicon oxide and disposed on an upper side of the IDT electrode;
a second dielectric layer made of silicon nitride or aluminum nitride and disposed on an upper side of the first dielectric layer; and
an acoustical layer disposed on an upper side of the second dielectric layer,
wherein the second dielectric layer has a film thickness in a range of 0.4λ to 0.7λ, where λ represents a wavelength at an operation center frequency of an elastic wave in the piezoelectric substrate, and
wherein the piezoelectric substrate is a Y-cut LiNbO 3 substrate with a cut angle ranging from −10 degrees to +30 degrees in which an elastic wave propagates in an X-axis direction or in a direction having a range of ±5 degrees with respect to the X axis.
2. The elastic wave device of claim 1 , wherein the first dielectric layer has a film thickness in a range of 0.1λ to 0.3λ.
3. The elastic wave device of claim 1 , wherein the IDT electrode is made of Cu.
4. A filter comprising the elastic wave device of claim 1 .
5. Electronic equipment comprising the elastic wave device of claim 1 .