Silica glass crucible
A silica glass crucible having a sidewall portion and a bottom portion is provided with a first synthetic silica glass layer constituting an inner layer at least in the sidewall portion, a second synthetic silica glass layer constituting an inner layer at least in a region including a center of the bottom portion, and a natural silica glass layer constituting an outer layer in the sidewall portion and the bottom portion. A melting rate of the second synthetic silica glass layer with respect to a silicon melt is higher than that of the first synthetic silica glass layer. An aluminum concentration of the second synthetic silica glass layer is higher than that of the first synthetic silica glass layer.
1. A silica glass crucible having a sidewall portion and a bottom portion, comprising:
a natural silica glass layer constituting an outer layer in the sidewall portion and the bottom portion;
a first synthetic silica glass layer constituting an inner layer at least in the sidewall portion; and
a second synthetic silica glass layer constituting an inner layer at least in a region including a center of the bottom portion, wherein:
the first synthetic silica glass layer is formed on an inner surface including a sidewall portion and a bottom portion of the natural silica glass layer,
the second synthetic silica glass layer is formed on an inner surface including a center of a bottom portion of the first synthetic silica glass layer,
the thickness of the second synthetic silica glass layer is 30 μm to 200 μm at the center of the bottom portion, and
a melting rate of the second synthetic silica glass layer with respect to a silicon melt is higher than that of the first synthetic silica glass layer.
2. The silica glass crucible as claimed in claim 1 , wherein a thickness of the second synthetic silica glass layer is smaller at locations farther away from the center of the bottom portion.
3. The silica glass crucible as claimed in claim 1 , wherein the melting rate of the second synthetic silica glass layer with respect to the silicon melt is two to three times of the melting rate of the first synthetic silica glass layer with respect to the silicon melt.
4. The silica glass crucible as claimed in claim 1 , wherein an aluminum concentration of the second synthetic silica glass layer is higher than that of the first synthetic silica glass layer.
5. The silica glass crucible as claimed in claim 4 , wherein the aluminum concentration of the second synthetic silica glass layer is 2 ppm to 20 ppm.
6. The silica glass crucible as claimed in claim 5 , wherein an aluminum concentration of the first synthetic silica glass layer is 0.2 ppm or less.