Semiconductor device
View Patent ↗A semiconductor device includes at least three or more wiring layers stacked in an interlayer insulating film on a semiconductor substrate, a seal ring provided at the outer periphery of a chip region of the semiconductor substrate and a chip strength reinforcement provided in part of the chip region near the seal ring. The chip strength reinforcement is made of a plurality of dummy wiring structures and each of the plurality of dummy wiring structures is formed to extend across and within two or more of the wiring layers including one or none of the bottommost wiring layer and the topmost wiring layer using a via portion.
1. A semiconductor device comprising:
a plurality of interlayer insulating films stacked on a semiconductor substrate;
at least three or more wiring layers formed in the plurality of interlayer insulating films; and
a chip strength reinforcement formed in the plurality of interlayer insulating films, wherein
the chip strength reinforcement is made of a plurality of dummy wiring structures and
each of the plurality of dummy wiring structures is formed to extend across and within two or more of the wiring layers including only one or none of the bottommost wiring layer and the topmost wiring layer using a via portion.
2. The semiconductor device of claim 1 , wherein
at least two of the plurality of dummy wiring structures have at least a portion formed in the same wiring layer.
3. The semiconductor device of claim 1 , wherein
at least one of a pair of dummy wiring structures among the plurality of dummy wiring structures has a portion formed in one of the wiring layers in which the other of the pair is not formed.
4. The semiconductor device of claim 1 , wherein
at least two of the plurality of dummy wiring structures have a portion formed in the bottommost wiring layer.
5. The semiconductor device of claim 1 , wherein
at least one of the plurality of dummy wiring structures has a portion extending in a certain direction in at least one of the wiring layers and another portion extending in a different direction in the same wiring layer and being connected to the certain portion.
6. The semiconductor device of claim 1 , wherein
the plurality of dummy wiring structures include a first dummy wiring structure and a second dummy wiring structure whose topmost portion is positioned below the topmost portion of the first dummy wiring structure,
at least two portions of the first dummy wiring structure are formed in at least two wiring layers, respectively, and at least two portions of the second dummy wiring structure are formed in the same at least two wiring layers, respectively, and
one of the at least two portions of the first dummy wiring structure formed in one of the at least two wiring layers and one of the at least two portions of the second dummy wiring structure formed in the other of the at least two wiring layers overlap each other when viewed in plan.
7. The semiconductor device of claim 6 , wherein
the second dummy wiring structure is formed to extend across and within three or more wiring layers using via portions and configured in the form of a ring and
a portion of the first dummy wiring structure is positioned inside the ring-shaped second dummy wiring structure.
8. The semiconductor device of claim 7 , wherein
the first dummy wiring structure is formed to extend across and within three or more wiring layers using via portions and configured in the form of a ring and
a portion of the second dummy wiring structure is positioned inside the ring-shaped first dummy wiring structure.
9. The semiconductor device of claim 1 , wherein
each of the plurality of dummy wiring structures contains copper.
10. The semiconductor device of claim 1 , wherein
the plurality of dummy wiring structures are provided at the corners of the chip region of the semiconductor substrate.
11. The semiconductor device of claim 1 , wherein
at least one of the plurality of dummy wiring structures does not include the topmost wiring layer, and is formed to extend across and within two or more wiring layers including the bottommost wiring layer using a via portion.
12. The semiconductor device of claim 1 , wherein
at least one of the plurality of dummy wiring structures does not include the bottommost wiring layer, and is formed to extend across and within two or more wiring layers including the topmost wiring layer using a via portion.
13. The semiconductor device of claim 1 , wherein
at least one of the plurality of dummy wiring structures is formed to extend across and within two or more wiring layers including none of the topmost wiring layer and the bottommost wiring layer using a via portion.
14. The semiconductor device of claim 1 , wherein
the interlayer insulating film includes an insulating film made of low dielectric constant material.
15. The semiconductor device of claim 1 , wherein
the interlayer insulating film includes a silicon carbon nitride film.
16. The semiconductor device of claim 1 , wherein
the interlayer insulating film includes a silicon carbon oxide film.
17. The semiconductor device of claim 1 , wherein
the interlayer insulating film includes a carbon-containing silicon oxide film.