Image display system and manufacturing method thereof
View Patent ↗An image display system and manufacturing method are disclosed. According to the present invention, the image display system comprises a substrate, a switching TFT, a driving TFT, a photo sensor and a capacitor. A buffer layer is formed on a substrate. A separation layer is formed in a first area for forming a switching TFT, but no heat sink layer is formed thereon. A heat sink layer is formed on a second area for forming the driving TFT, the photo sensor and the capacitor, and then, the separation layer is formed thereafter. The present invention can form poly silicon layers with different crystal grain sizes on the first area and on the second area in a single laser crystallization process by utilizing the heat sink phenomenon of ELA with or without the heat sink layer. Therefore, the image display system of the present invention can operate with good luminance uniformity.
1. An image display system, comprising:
a substrate having a first area and a second area;
a switching thin film transistor (TFT) positioned on the first area and having a first poly silicon layer; and
a driving TFT positioned on the second area and having a second poly silicon layer, a heat sink layer and a separation layer between the second poly silicon layer and the heat sink layer,
wherein the first poly silicon layer and the second poly silicon layer have different crystal grain characteristics.
2. The image display system of claim 1 , wherein the switching TFT comprises a buffer layer formed on the substrate and the first poly silicon layer formed on the buffer layer; and the driving TFT comprises the buffer layer formed on the substrate, the heat sink layer formed on the buffer layer, the separation layer formed on the heat sink layer and the second poly silicon layer formed on the separation layer.
3. The image display system of claim 1 , wherein the first poly silicon layer and the second poly silicon layer have different crystal grain structures.
4. The image display system of claim 1 , wherein a crystal grain size of the first poly silicon layer is larger than that of the second poly silicon layer.
5. The image display system of claim 1 , wherein a mobility of the first poly silicon layer is higher than that of the second poly silicon layer.
6. The image display system of claim 1 , further comprising a photo sensor positioned on the second area of the substrate and having the second poly silicon layer, wherein the heat sink layer is employed to reflect light irradiating on the photo sensor.
7. The image display system of claim 1 , further comprising a capacitor positioned on the second area of the substrate, wherein the heat sink layer is employed as an electrode of the capacitor.
8. The image display system of claim 7 , wherein the heat sink layer is connected with the capacitor in parallel.
9. The image display system of claim 1 , wherein the heat sink layer is a metal layer.
10. The image display system of claim 9 , wherein the metal layer is a molybdenum layer or a molybdenum alloy layer.
11. The image display system of claim 1 , wherein the image display system is employed in a mobile phone, a digital camera, a personal digital assistance, a notebook, a laptop computer, a television, an in-vehicle display, a global positioning system, a flight display, a digital photo frame or a portable DVD player.