Controlled quantum dot growth
View Patent ↗The present disclosure generally relates to techniques for controlled quantum dot growth as well as a quantum dot structures. In some examples, a method is described that includes one or more of providing a substrate, forming a defect on the substrate, depositing a layer on the substrate and forming quantum dots along the defect.
1. A method for quantum dot growth comprising:
forming a trench in a substrate;
filling the trench with a material to form a defect region along an interface between the material and the substrate on a surface of the substrate; and
growing quantum dots in the defect region, wherein the growth is based at least in part on a location of the defect region, such that the growth of quantum dots is substantially confined to the defect region.
2. The method of claim 1 , wherein the substrate comprises silicon, and the material comprises germanium.
3. The method of claim 1 , wherein the trench has a first edge and a second edge and wherein quantum dots are formed predominantly along the first edge and the second edge.
4. The method of claim 1 , wherein the substrate comprises a silicon wafer and wherein the material comprises germanium silicon.
5. The method of claim 4 , further comprising smoothing the substrate after the trench has been filled with the material.
6. A computer accessible medium having stored thereon computer executable instructions for performing a procedure for quantum dot growth the procedure comprising:
forming a trench in a substrate;
filling the trench with a first material to form a defect region along an interface between the material and the substrate on a surface of a substrate; and
depositing a second material on the surface of the substrate such that quantum dots are formed in the defect region, wherein the quantum dots are substantially confined to the defect region.
7. The computer accessible medium of claim 6 , wherein the procedure further comprises smoothing the substrate after the trench has been filled with the first material.
8. The computer accessible medium of claim 6 , wherein depositing a second material on the substrate comprises depositing the second material using molecular beam epitaxy.
9. The method of claim 1 , wherein the material comprises a first material, and wherein said growing comprises depositing a second material on the surface of the substrate such that quantum dots are formed in the defect region, while a second region removed from the defect region is substantially free of quantum dots.
10. The method of claim 1 , wherein forming a trench comprises forming a linear trench.
11. The method of claim 1 , wherein the material comprises polysilicon.
12. The method of claim 1 , further comprising forming a pattern of defect regions, wherein the pattern comprises a grid.
13. The method of claim 1 , wherein growing comprises growing quantum dots according to the Volmer-Weber growth mode, the Frank-van der Merwe growth mode, the Stranski-Krastonov growth mode, or a combination thereof.
14. The method of claim 1 , wherein said filling the trench occurs before said growing quantum dots.
15. The method of claim 9 , wherein depositing a material on the substrate comprises depositing a material using molecular beam epitaxy.
16. The method of claim 9 , further comprising forming a thin film layer over the deposited material and depositing another material on the thin film layer.
17. The method of claim 16 , wherein the substrate and the thin film layer are formed of the same material.
18. The method of claim 16 , wherein the thin film layer has a thickness between about 0.25 μm to about 0.5 μm.