Phase-separated dielectric structure fabrication process
View Patent ↗A process for fabricating an electronic device including: depositing a layer comprising a semiconductor; liquid depositing a dielectric composition comprising a lower-k dielectric material, a higher-k dielectric material, and a liquid, wherein the lower-k dielectric material and the higher-k dielectric material are not phase separated prior to the liquid depositing; and causing phase separation of the lower-k dielectric material and the higher-k dielectric material to form a phase-separated dielectric structure wherein the lower-k dielectric material is in a higher concentration than the higher-k dielectric material in a region of the dielectric structure closest to the layer comprising the semiconductor, wherein the depositing the layer comprising the semiconductor is prior to the liquid depositing the dielectric composition or subsequent to the causing phase separation.
1. A dielectric composition for fabricating a phase separated dielectric structure by liquid deposition, comprising a lower-k dielectric material, a higher-k dielectric material, and a liquid, wherein the lower-k dielectric material and the higher-k dielectric material are capable of phase separation subsequent to liquid deposition;
wherein the higher-k dielectric material has a dielectric constant of 4.0 or higher.
2. The dielectric composition of claim 1 , wherein the lower-k dielectric material and the higher-k dielectric material are dissolved in the liquid and form a single phase prior to liquid deposition.
3. The dielectric composition of claim 1 , wherein the lower-k dielectric material has a hydrophobic surface subsequent to liquid deposition.
4. The dielectric composition of claim 1 , wherein the lower-k dielectric material has a dielectric constants of less than 4.0.
5. The dielectric composition of claim 1 , wherein the lower-k dielectric material comprises nonpolar or weak polar groups.
6. The dielectric composition of claim 1 , wherein the lower-k dielectric material is a polystyrene, polysiloxane, polysilsesquioxane, polyphenylene, poly(1,3-butadiene), poly(α-vinylnaphthalene), polypropylene, polyisoprene, polyisobutylene, polyethylene, poly(4-methyl-1-pentene), poly(p-xylene), poly(cyclohexyl methacrylate), poly (propylmethacrylPOSS-co-methylmethacrylate), poly(propylmethacrylPOSS-co-styrene), poly(styrylPOSS-co-styrene), or poly(vinyl cinnamate).
7. The dielectric composition of claim 1 , wherein the lower-k dielectric material is poly(methyl silsesquioxane).
8. The dielectric composition of claim 1 , wherein the higher-k dielectric material comprises polar groups.
9. The dielectric composition of claim 1 , wherein the higher-k dielectric material is a polyimide, polyester, polyether, polyacrylate, polyvinyl, polyketone, polysulfone, poly(4-vinyl phenol) (PVP), poly(vinyl alcohol), poly(2-hydroxylethyl methacrylate) (PHEMA), cyanoethylated poly(vinyl alcohol), cyanoethylated cellulose, poly(vinylidene fluoride) (PVDF), poly(vinyl pyridine), or copolymer thereof.
10. The dielectric composition of claim 1 , wherein the higher-k dielectric material is poly(4-vinyl phenol) or poly(2-hydroxylethyl methacrylate).
11. The dielectric composition of claim 1 , wherein the difference in magnitude of the dielectric constant of the higher-k dielectric material versus the lower-k dielectric material is at least about 0.5.
12. The dielectric composition of claim 1 , wherein the liquid comprises water, an alcohol, an acetate, a ketone, an ether, a hydrocarbon, an aromatic hydrocarbon, a chlorinated solvent, dimethyl sulfoxide, trifluoroacetic acid, acetonitrile, dimethyl formamide, dimethyl acetamide, pyridine, or n-methyl-alpha-pyrrolidinone.
13. The dielectric composition of claim 1 , wherein the concentration of the lower-k dielectric material is from about 0.5 to about 50 percent by weight, and the concentration of the higher-k dielectric material is from about 0.5 to about 50 percent by weight, based on the total weight of the lower-k dielectric material, the higher-k dielectric material, and the liquid.
14. The dielectric composition of claim 1 , wherein the weight ratio of the lower-k dielectric material to the higher-k dielectric material is from about 10:90 to about 40:60.
15. The dielectric composition of claim 1 , further comprising a crosslinking agent for the lower-k dielectric material or the higher-k dielectric material.
16. The dielectric composition of claim 1 , further comprising inorganic nanoparticles.
17. A dielectric composition comprising:
a lower-k polysilsesquioxane dielectric material;
a higher-k dielectric material selected from poly(4-vinyl phenol) and poly(2-hydroxylethyl methacrylate); and
a liquid in which both the lower-k dielectric material and the higher-k dielectric material are miscible.
18. The dielectric composition of claim 17 , wherein the liquid is an alcohol.
19. The dielectric composition of claim 17 , wherein the weight ratio of the lower-k dielectric material to the higher-k dielectric material is from about 10:90 to about 40:60.