Granted Patent B2

US 8,762,089 · App. 12/437,996 · Granted Jun 24, 2014

Abstract

Claims (83)

1. A method for testing a substrate for a display device, the method comprising:

inputting design information for the display device;

specifying at least one of a target area for test and a target area for analysis in the substrate, based on the design information;

generating weighting information for a detection result by test, based on the design information;

performing operation on the detection result of test of an object under test in the substrate and the weighting information; and

making a decision on pass/fail of the object under test in the substrate from the weighted detection result and a preset threshold value,

wherein the design information includes a first array information regarding a center part made up of pixels of a rectangular shape and pixels of a non-rectangular shape arranged around the center part in a display area of a non-rectangular shape.

2. The method according to claim 1 , comprising

in generating the weighting information based on the design information,

utilizing, among the design information, at least one of:

information on the number of pixels connected to a wiring of the substrate; and

information on number of pixels around a pixel under test or locations of the pixels around the pixel under test.

3. The method according to claim 1 , further comprising:

controlling an arrangement and/or a number of electron beam spots to be irradiated on pixels on the target area for test of the substrate in accordance with pixels and a shape of an outer peripheral part of the substrate, based on the shape of a pixel electrode of an outer peripheral part; and

irradiating an electron beam on the target area for test of the substrate and detecting secondary electrons emitted from the substrate to produce a detection result for the test.

4. The method according to claim 1 , further comprising:

performing two-dimensional weighting for a given pixel and pixels neighboring thereto on the substrate; and

emphasizing, by the two-dimensional weighting, information regarding a defect present in the given pixel in comparison with information regarding peripheral non-defective pixels to facilitate defect detection.

5. The method according to claim 1 , further comprising:

performing two-dimensional weighting for a given pixel and pixels neighboring thereto on the substrate; and

emphasizing, by the two-dimensional weighting, information regarding a defect present in the given pixel in comparison with information of neighboring non-defective pixels to enable detection of non-defective pixels, without being influenced by the presence of defects in the neighboring pixels.

6. The method according to claim 1 , further comprising:

performing two-dimensional weighting for a given pixel and pixels neighboring thereto on the substrate; and

deducting, by the two-dimensional weighting, information regarding a defect of pixels neighboring to the given pixel to reduce the influence of a peripheral defective pixel or pixels on the given pixel which is non-defective.

7. The method according to claim 6 , further comprising:

emphasizing information regarding a defect of the given pixel to reduce an influence from a normal pixel.

8. The method according to claim 1 , comprising in generating the weighting information based on the design information, utilizing information of a dummy pixel neighboring to a pixel in the target area for test.

9. The method according to claim 1 , further comprising:

determining whether or not a dummy cell is included in a target area for test, based on the design information which includes arrangement information of dummy cells provided in the display area.

10. The method according to claim 1 , wherein a number of peripheral pixels around each pixel of a plurality of pixels ranges from 1 to 8.

11. A method for testing a substrate for a display device, the method comprising:

inputting design information for the display device;

specifying at least one of a target area for test and a target area for analysis in the substrate, based on the design information;

generating weighting information for a threshold value by which pass/fail of an object under test in the substrate is decided, based on the design information;

performing operation on the threshold value and the weighting information; and

making a decision on pass/fail of the object under test in the substrate from a detection result of test of the object under test in the substrate and the weighted threshold value,

wherein the design information includes information regarding a center part made up of pixels of a rectangular shape and pixels of a non-rectangular shape arranged around the center part in a display area of a non-rectangular shape.

12. An apparatus for testing a substrate for a display device, the apparatus comprising:

a measurement unit that conducts measurement for test of the substrate for the display device including a plurality of pixels in a display area of a non-rectangular shape; and

an operation unit that inputs design information for the display device and that specifies at least one of a target area for test and a target area for analysis in the substrate, based on the design information,

wherein the design information includes a first array information regarding a center part made up of pixels of a rectangular shape and pixels of a non-rectangular shape arranged around the center part in a display area of a non-rectangular shape, and

wherein the operation unit comprises:

a unit that generates weighting information based on the design information;

a unit that performs operation on a detection result of test of an object under test in the substrate conducted by the measurement unit and the weighting information; and

a unit that makes a decision on pass/fail of the object under test in the substrate from the weighted detection result and a preset threshold value.

13. The apparatus according to claim 12 , wherein the unit that generates the weighting information based on the design information, utilizes, among the design information, at least one of:

information on the number of pixels connected to a wiring of the substrate; and

information on the number of pixels around a pixel under test or locations of the pixels around the pixel under test.

14. The apparatus according to claim 12 , wherein the operation unit controls an arrangement and/or a number of electron beam spots to be irradiated on pixels on the target area for test of the substrate in accordance with pixels of an outer peripheral part of the substrate and a shape of the outer peripheral part of the substrate, based on the shape of a pixel electrode of an outer peripheral part, and wherein

the measurement unit, under the control of the operation unit, irradiates an electron beam on the target area for test of the substrate and that detects secondary electrons emitted from the substrate to produce a detection result of test for output to the operation unit.

15. The apparatus according to claim 12 , wherein, when generating the weighting information based on the design information, the operation unit utilizes information of a dummy pixel neighboring to a pixel in the target area for test.

16. The apparatus according to claim 12 , wherein the operation unit comprises

a unit that determines whether or not a dummy cell is included in a target area for test, based on the design information which includes arrangement information of dummy cells provided in the display area.

17. An apparatus for testing a substrate for a display device, the apparatus comprising: an operation unit that inputs design information for the display device and that specifies at least one of a target area for test and a target area for analysis in the substrate, based on the design information, wherein the operation unit comprises: a unit that generates weighting information for a preset threshold value by which pass/fail of an object under test in the substrate is decided, based on the design information; a unit that performs operation on the threshold value and the weighting information; and a unit that makes a decision on pass/fail of the object under test in the substrate from a detection result of test of the object under test in the substrate conducted by the measurement unit and the weighted threshold value, and wherein the design information includes information regarding to a center part made up of pixels of a rectangular shape and pixels of a non-rectangular shape arranged around the center part in a display area of a non-rectangular shape.

18. A method for testing a substrate for a display device, the method comprising:

inputting design information for the display device;

specifying at least one of a target area for test and a target area for analysis in the substrate, based on the design information;

generating weighting information based on the design information;

performing operation on a detection result of test of an object under test in the substrate and the weighting information; and

making a decision on pass/fail of the object under test in the substrate from the weighted detection result and a preset threshold value,

wherein the design information includes a first array information regarding a center part made up of pixels of a rectangular shape and pixels of a non-rectangular shape arranged around the center part in a display area of a non-rectangular shape, and

wherein in generating the weighting information based on the design information, utilizing, among the design information, at least one of:

information on the number of pixels connected to a wiring of the substrate; and

information on number of pixels around a pixel under test or locations of the pixels around the pixel under test.

19. An apparatus for testing a substrate for a display device, the apparatus comprising:

a measurement unit that conducts measurement for test of the substrate for the display device including a plurality of pixels in a display area of a non-rectangular shape; and

an operation unit that inputs design information for the display device and that specifies at least one of a target area for test and a target area for analysis in the substrate, based on the design information,

wherein the design information includes a first array information regarding a center part made up of pixels of a rectangular shape and pixels of a non-rectangular shape arranged around the center part in a display area of a non-rectangular shape,

wherein the operation unit comprises:

a unit that generates weighting information based on the design information;

a unit that performs operation on a detection result of test of an object under test in the substrate conducted by the measurement unit and the weighting information; and

a unit that makes a decision on pass/fail of the object under test in the substrate from the weighted detection result and a preset threshold value, and

wherein the unit that generates the weighting information based on the design information, utilizes, among the design information, at least one of:

information on the number of pixels connected to a wiring of the substrate; and

information on the number of pixels around a pixel under test or locations of the pixels around the pixel under test.

20. A method for testing a substrate for a display device, the method comprising:

inputting design information for the display device;

specifying at least one of a target area for test and a target area for analysis in the substrate, based on the design information;

generating weighting information for a detection result by test, based on the design information;

performing operation on the detection result of test of an object under test in the substrate and the weighting information; and

making a decision on pass/fail of the object under test in the substrate from the weighted detection result and a preset threshold value,

wherein the design information includes information regarding to a repetitive pattern of sets of pixels and one or more pixels isolated from the sets of pixels in a display area of a non-rectangular shape, and

wherein a form of the sets of pixels is a non-rectangular shape.

Assignments (6)