Semiconductor substrate for epitaxial growth and manufacturing method thereof
View Patent ↗Provided is a semiconductor substrate for epitaxial growth which does not require any etching treatment as a pretreatment in the stage of performing an epitaxial growth of HgCdTe film. A CdTe system compound semiconductor substrate for the epitaxial growth of the HgCdTe film is housed in an inactive gas atmosphere, in a predetermined period of time (for example, 10 hours) after mirror finish treatment thereof, to thereby regulate the proportion of Te oxide of the total amount of Te on the substrate surface which is obtained by XPS measurement so as to be not more than 30%.
1. A CdTe system compound semiconductor substrate to perform an HgCdTe epitaxial growth, wherein the substrate is housed, sealed and stored in a predetermined wafer storage container within 10 hours after the substrate has been subjected to a mirror finish treatment, the predetermined wafer storage container being filled with an inactive gas, and wherein a proportion of a Te oxide of a total amount of Te on a surface of the substrate is not more than 30%, when the substrate is removed from the container and is used for the epitaxial growth, the proportion being able to be obtained by an XPS measurement carried out after the CdTe substrate has been stored for 30 days in the state of being stored.
2. A manufacturing method of a semiconductor substrate for an epitaxial growth to perform an HgCdTe epitaxial growth, comprising: housing, sealing and storing the substrate in a predetermined wafer storage container within 10 hours after the substrate has been subjected to a mirror finish treatment, the predetermined wafer storage container being filled with an inactive gas.