Ceramic substrate part and electronic part comprising it
View Patent ↗A ceramic substrate part comprising on its upper surface pluralities of external electrodes comprising wire-bonding electrodes, each of which comprises a primer layer based on Ag or Cu, a Ni-based lower layer, an intermediate layer based on a Pd—P alloy containing 0.4-5% by mass of P, and a Au-based upper layer formed in this order on a ceramic substrate, the upper layer containing Pd after heated by soldering, and having a Au concentration of 80 atomic % or more based on the total concentration (100 atomic %) of Au and Pd.
1. A ceramic substrate part comprising on its upper surface pluralities of external electrodes comprising wire-bonding electrodes, each of which comprises a primer layer based on Ag or Cu, a Ni-based lower layer, an intermediate layer based on a Pd—P alloy containing 0.4-5% by mass of P, and a Au-based upper layer formed in this order on a ceramic substrate, said upper layer containing Pd after heated by soldering, and having a Au concentration of 80 atomic % or more based on the total concentration (100 atomic %) of Au and Pd.
2. The ceramic substrate part according to claim 1 , wherein said intermediate layer has a P content of 1.2-4% by mass, and said upper layer has a Au concentration of 85 atomic % or more.
3. The ceramic substrate part according to claim 1 , wherein said intermediate layer has a thickness of 0.05-0.2 μm.
4. The ceramic substrate part according to claim 1 , wherein said upper layer has a thickness of 0.03-0.2 μm.
5. The ceramic substrate part according to claim 1 , wherein part of said external electrodes are mounting electrodes, to which devices are connected by soldering.
6. An electronic part comprising the ceramic substrate part recited in claim 1 , and semiconductor devices mounted on said ceramic substrate part, said semiconductor devices being connected to said wire-bonding electrodes with gold wires.