Magnetic recording medium manufacturing method and laminate manufacturing method
View Patent ↗[Problems] To have a thin film suitably function even when the thickness of the thin film is reduced. [Means for Solving Problems] Provided is a method for manufacturing a magnetic recording medium by forming a thin film on a substrate ( 12 ). The method is provided with a thin film forming step of forming the thin film by using a substance brought into the plasma state as a material. In the thin film forming step, the thin film is formed by using a material substance gathering means ( 30 ) for gathering the substance brought into the plasma state to the periphery of the substrate. The material substance gathering means ( 30 ) gathers the substance brought into the plasma state, for instance, to the periphery of the substrate ( 12 ) by generating a magnetic field at the periphery of the substrate ( 12 ).
1. A magnetic recording medium manufacturing method of forming a thin film over a substrate, said magnetic recording medium manufacturing method characterized by comprising
a magnetic layer forming step of forming a magnetic layer over said substrate;
a protective film forming step of forming a hydrocarbon protective film over said magnetic layer; and
a thin film forming step of forming said thin film using a plasma-converted substance as a material,
wherein said thin film forming step forms said thin film using material substance concentration means for gathering said plasma-converted substance around said substrate by generating a magnetic field around said substrate using a magnet having a maximum energy product of 1.0 to 50 MGOe, the magnet being provided at a position facing an outermost surface of said hydrocarbon protective film, the outermost surface being opposite of a side of said hydrocarbon protective film that is closer to said magnetic layer;
and said thin film forming step is a step of introducing nitrogen into a surface of said hydrocarbon protective film by a plasma CVD method using a nitrogen gas and by applying a bias voltage to said substrate, thereby forming a film containing the nitrogen at the outermost surface of said hydrocarbon protective film.
2. A magnetic recording medium manufacturing method according to claim 1 , characterized in that said thin film forming step applies an RF bias with a power of 400 W or less to said substrate.
3. A magnetic recording medium manufacturing method according to claim 1 , characterized in that
said protective film forming step forms said hydrocarbon protective film having a thickness of 5 nm or less, and
said thin film forming step forms the film containing the nitrogen wherein an atomic ratio (N/C) of nitrogen to carbon at the outermost surface is 0.05 to 0.15.
4. A magnetic recording medium manufacturing method according to claim 1 ,
wherein said protective film forming step forms said hydrocarbon protective film over said magnetic layer by a plasma CVD method using a hydrocarbon gas.
5. A laminate manufacturing method of forming a thin film over a substrate, said laminate manufacturing method characterized by comprising
a magnetic layer forming step of forming a magnetic layer over said substrate;
a protective film forming step of forming a hydrocarbon protective film over said magnetic layer; and
a thin film forming step of forming said thin film using a plasma-converted substance as a material,
wherein said thin film forming step forms said thin film using material substance concentration means for gathering said plasma-converted substance around said substrate by generating a magnetic field around said substrate using a magnet having a maximum energy product of 1.0 to 50 MGOe, the magnet being provided at a position facing an outermost surface of said hydrocarbon protective film, the outermost surface being opposite of a side of said hydrocarbon protective film that is closer to said magnetic layer;
and said thin film forming step is a step of introducing nitrogen into a surface of said hydrocarbon protective film by a plasma CVD method using a nitrogen gas and by applying a bias voltage to said substrate, thereby forming a film containing the nitrogen at the outermost surface of said hydrocarbon protective film.