Method for depositing thin film for magnetic recording medium
View Patent ↗A method for depositing a thin film for a magnetic recording medium includes the steps of placing a substrate for a recording medium having a magnetic recording layer thereon on a substrate holder rotatably arranged within a film deposition chamber; and supplying a plasma beam from a plasma beam formation portion to the film deposition chamber so as to form a thin film of ta-C on the magnetic recording layer. In supplying the plasma beam, an inclination angle formed by a normal line to a surface of the magnetic recording layer and a plane orthogonal to a direction of incidence of the plasma beam is changed from a minimum inclination angle to a maximum inclination angle according to an increase in film thickness of the ta-C thin film.
1. A method for depositing a thin film for a magnetic recording medium, comprising the steps of:
placing a substrate for a recording medium having a magnetic recording layer thereon, on a substrate holder rotatably arranged within a film deposition chamber; and
supplying a plasma beam from a plasma beam formation portion to the film deposition chamber so as to form a thin film of tetrahedral amorphous carbon on the magnetic recording layer, while continuously changing an inclination angle formed by a normal line on a surface of the magnetic recording layer and a plane orthogonal to a direction of incidence of the plasma beam, from a minimum inclination angle to a maximum inclination angle according to an increase in film thickness of the tetrahedral amorphous carbon thin film being formed,
wherein the minimum inclination angle is more than 0° and less than 10°, and the maximum inclination angle is less than 80°.
2. A method for depositing a thin film for a magnetic recording medium according to claim 1 , wherein the substrate holder holds the substrate in a disk shape and is rotated around a rotational axis normal to the substrate during the thin film formation.
3. A method for depositing a thin film for a magnetic recording medium according to claim 2 , wherein the substrate holder rotates three times or more before a completion of the film formation.
4. A method for depositing a thin film for a magnetic recording medium according to claim 3 , wherein while the inclination angle is monotonically increased from the minimum inclination angle to the maximum inclination angle, the thin film is being formed.
5. A method for depositing a thin film for a magnetic recording medium according to claim 1 , wherein the plasma beam supplied from the plasma beam formation portion hits the magnetic recording layer and is exhausted from an exhaust opening arranged at a side opposite to the plasma beam formation portion.