Area-variable type capacitive displacement sensor having mechanical guide
An area-variable type capacitive displacement sensor includes: a stationary element; a movable element; an elastic member for providing a force biasing one of the stationary element and the movable member towards a remaining one thereof in a direction perpendicular to a driving direction so that the stationary element and the movable member are maintained in close contact with each other; a power supply; and a signal detecting circuit. The sensor further includes a guide means for correcting an initial alignment error and reducing an operation alignment error between the stationary element and the movable element.
1. An area-variable type capacitive displacement sensor, comprising:
a stationary element having a stationary member and a first conductive pattern being formed on the stationary member;
a movable element having a movable member and a second conductive pattern being formed on the movable member such that the second conductive pattern of the movable element is parallel to the first conductive pattern of the stationary element, so that when the movable element moves in parallel to the stationary element, an overlapped area between the first and second conductive patterns is varied;
an elastic member for providing a force biasing one of the stationary element and the movable element towards a remaining one thereof in a direction perpendicular to a driving direction so that the stationary element and the movable element are maintained in close contact with each other;
a power supply for supplying power to one of the first and second conductive patterns of the stationary element and the movable element to generate an output signal depending on a variation in capacitance between the stationary element and the movable element;
a signal detecting circuit connected to a remaining one of the first and second conductive patterns of the stationary element and the movable element to detect the variation in capacitance between the stationary element and the movable element and then output the variation in capacitance as an electric signal; and
a guide means for correcting an initial alignment error and reducing an operation alignment error between the stationary element and the movable element, and wherein the guide means includes:
an insert protrusion protruding upwards from a central portion of the movable element by a predetermined height; and
a pair of guide protrusions protruding downwards from the stationary element;
wherein the first conductive pattern of the stationary element is formed on a bottom of a space defined between the guide protrusions, and the second conductive pattern of the movable element is protruded upward to form the insert protrusion, such that the gap is defined between the first conductive pattern of the stationary element and the second conductive pattern of the movable element
wherein at least a part of the first and second conductive patterns is protruded upward or downward to form the guide means.