Method of forming semiconductor device by using reduction projection aligner
View Patent ↗Lithography process is conducted to expose chip patterns to light on a semiconductor wafer. The process includes exposing a plurality of chip patterns to light in a first shot region in one direction on the semiconductor wafer, and exposing a plurality of chip patterns to light in a second region obtained by rotating the first shot region by 90° in a region in which all the chip patterns in the first shot region at the periphery of the semiconductor wafer are regarded as ineffective.
1. A semiconductor device manufacturing method employed for exposing chip patterns to light on a semiconductor wafer in a lithography process, the method comprising:
exposing a plurality of chip patterns to light in a first shot region in one direction on the semiconductor wafer;
exposing a plurality of chip patterns to light in a second region obtained by rotating the first shot region by 90° in a region in which all the chip patterns in the first shot region at a periphery of the semiconductor wafer are regarded as ineffective;
wherein the first shot region comprises effective and ineffective chip patterns.
2. The method according to claim 1 ,
wherein the chip patterns in the first shot region are subjected to light exposure only when at least one chip pattern therein is effective in an effective wafer region in which effective chip patterns can be formed.
3. The method according to claim 1 ,
wherein the chip patterns in the second shot region are subjected to light exposure only when at least one chip pattern therein is effective in the effective wafer region in which effective chip patterns can be formed.
4. The method according to claim 1 ,
wherein the chip patterns in the second shot region are subjected to light exposure by rotating the semiconductor wafer put on a wafer stage by 90° while a reticle having a mask pattern associated with the chip patterns is held thereon.
5. The method according to claim 1 ,
wherein the chip patterns in the second shot region are subjected to light exposure by rotating the reticle having a mask pattern associated with the chip patterns by 90° while the semiconductor wafer is held as is.
6. The method according to claim 1 ,
wherein the chip patterns are formed in a rectangular region of which an aspect ratio is 2 or more.
7. The method according to claim 6 ,
wherein the chip patterns comprise liquid crystal driver circuit patterns.