Liquid crystal display having transparent conductive film on interlayer insulating film formed by coating
View Patent ↗A liquid crystal display is fabricated which has bus wires disposed in a grid shape, switching elements coupled to the bus wires, and pixel electrodes which are disposed on an interlayer insulating film formed by coating and which are coupled with the switching elements. In fabricating the liquid crystal display, when a transparent conductive film is formed on the interlayer insulating film which is formed by coating, the temperature of the substrate is controlled to become 100° C.-170° C. In another embodiment, when the transparent conductive film is formed on the interlayer insulating film in a non-heated condition, an oxygen flow rate ratio is set to 1% or lower, and annealing is performed after forming the film. Thereby, when etching the ITO film on the interlayer insulating film, etching residue is not produced. Further, contact resistance between the ITO film and the lower layer metal can be uniformly decreased, and display defects can be obviated.
1. A liquid crystal display comprising:
a transparent substrate;
a plurality of parallel scanning lines disposed on the transparent substrate;
a plurality of parallel signal lines which cross the plurality of parallel scanning lines;
switching elements coupled to the scanning lines and the signal lines;
pixel electrodes formed from a transparent conductive film disposed on an interlayer insulating film formed by coating, the pixel electrodes being coupled with the switching elements via contact through holes formed through the interlayer insulating film; and
signal line terminals each of which is coupled to one end of the respective signal lines and comprises a stacked portion of the transparent conductive film and a lower layer metal film and which are disposed on opposite sides of the substrate alternately;
wherein the transparent conductive film in each of signal line terminals disposed on opposite sides of the substrate has crystallinity at a coupling portion between the transparent conductive film and the lower layer metal film, and
contact resistance between the transparent conductive film and the lower layer metal film differs between the signal line terminals on opposite sides of the substrate by a value of 1500Ω or smaller.
2. A liquid crystal display as set forth in claim 1 , wherein the interlayer insulating film formed by coating is an organic insulating film.
3. A liquid crystal display as set forth in claim 1 , wherein the transparent conductive film is made of ITO, and the lower layer metal film coupled with the transparent conductive film is made of chromium or an alloy containing chromium as the main constituent.