IP Library Granted Patent US 9,284,639
Granted Patent B2
US 9,284,639 · App. 12/461,053 · Granted Mar 15, 2016

Method for alkali doping of thin film photovoltaic materials

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Quick Facts
Patent No.
US 9,284,639
App. No.
12/461,053
Granted
Mar 15, 2016
Kind
B2
Abstract

An alkali-containing transition metal sputtering target, the method of making the same, and the method of manufacturing a solar cell using the same.

Claims (21)

1. A method of forming an alkali-containing transition metal sputtering target, comprising:

providing a sputtering target comprising a transition metal;

applying a salt solution comprising an alkali metal to the sputtering target; and

drying the alkali-containing transition metal sputtering target.

2. The method of claim 1 , wherein the transition metal is selected from a group consisting of Mo, Cr, Nb, W, V, Ta, Ti, Zr, and Zn.

3. The method of claim 2 , wherein the transition metal comprises Mo.

4. The method of claim 3 , wherein the alkali metal comprises Na and the target comprises a sodium containing molybdenum sputtering target.

5. The method of claim 4 , wherein the salt is selected from a group comprises sodium chloride, sodium fluoride, sodium molybdate, sodium tungstate, sodium titanate, sodium metavanadate, sodium orthovanadate, sodium hydroxide, sodium oxide, sodium fluoride, sodium selenide, sodium selenate, sodium selenite, sodium sulfate, sodium sulfide, sodium sulfite, or a combination thereof.

6. The method of claim 2 , wherein the salt solution further comprises a polar solvent.

7. The method of claim 2 , wherein the step of applying further comprises agitating the salt solution.

8. The method of claim 2 , wherein the step of applying further comprises increasing a temperature of the salt solution to a temperature below the boiling point of the salt solution.

9. The method of claim 2 , wherein the step of applying further comprises increasing a pressure in a chamber containing the salt solution and the target up to 50,000 psi.

10. The method of claim 2 , wherein the salt solution further comprises a wetting agent.

11. The method of claim 2 , further comprising disposing the target in a vacuum chamber and backfilling the chamber with a soluble gas before the step of applying.

12. The method of claim 2 , wherein the step of applying further comprises facilitating precipitation.

13. The method of claim 2 , wherein the step of drying further comprises increasing a temperature of the target up to the melting point of the salt.

14. The method of claim 2 , wherein the step of drying occurs in a vacuum.

15. The method of claim 2 , further comprising repeating the steps of depositing and drying to reach a desired concentration of alkali metal in the target.

16. The method of claim 1 , wherein a porosity of the target is below 75% dense.

17. The method of claim 1 , wherein providing a sputtering target comprises using a powder metallurgy process to consolidate the target.

18. The method of claim 5 , wherein the salt comprises sodium molybdate.

Assignments (6)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Feb 29, 2016
From: APOLLO PRECISION KUNMING YUANHONG LIMITED
To: BEIJING APOLLO DING RONG SOLAR TECHNOLOGY CO., LTD.
Reel/Frame 037855/0019 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jan 27, 2015
From: HANERGY HOLDING GROUP LTD.
To: APOLLO PRECISION KUNMING YUANHONG LIMITED
Reel/Frame 034825/0979 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jan 20, 2014
From: MIASOLE
To: HANERGY HOLDING GROUP LTD.
Reel/Frame 032092/0694 →
RELEASE OF SECURITY INTEREST Recorded Jan 7, 2013
From: PINNACLE VENTURES, L.L.C.
To: MIASOLE
Reel/Frame 029579/0494 →
SECURITY AGREEMENT Recorded Aug 28, 2012
From: MIASOLE
To: PINNACLE VENTURES, L.L.C.
Reel/Frame 028863/0887 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jul 30, 2009
From: JULIANO, DANIEL R.
To: MIASOLE
Reel/Frame 023077/0162 →