Etchant composition, and methods of patterning conductive layer and manufacturing flat panel display device using the same
View Patent ↗An etchant composition, and methods of patterning a conductive layer and manufacturing a flat panel display device using the same are provided. The etchant composition may include phosphoric acid, nitric acid, acetic acid, water and an additive, wherein the additive includes a chlorine-based compound, a nitrate-based compound, and an oxidation regulator. In addition, the flat panel display device may be manufactured by patterning a gate electrode, source/drain electrodes and a pixel electrode using the same etchant composition. The gate electrode, source/drain electrodes and the pixel electrode may be formed of different conductive materials. Accordingly, processes are simplified so that manufacturing costs may be reduced and productivity may be improved.
1. An etchant composition comprising a phosphoric acid, a nitric acid, an acetic acid, water and an additive, wherein the additive comprises a chlorine-based compound, a nitrate-based compound, a sulfate-based compound, and an oxidation regulator,
wherein the phosphoric acid has a concentration of about 40 to 70 wt %, the nitric acid has a concentration of about 3 to 15 wt %, the acetic acid has a concentration of about 5 to 35 wt %, the chlorine-based compound has a concentration of about 0.02 to 5 wt %, the nitrate-based compound has a concentration of about 0.05 to 5 wt %, the sulfate-based compound has a concentration of about 0.05 to 5 wt %, the oxidation regulator has a concentration of about 1 to 10 wt %, and a quantity of water is a residual amount.
2. The etchant composition according to claim 1 , wherein the chlorine-based compound is at least one selected from the group consisting of KCl, HCl, LiCl, NaCl, NH 4 Cl, CuCl 2 , FeCl 3 , FeCl 2 , CaCl 2 , CoCl 2 , NiCl 2 , ZnCl 2 , AlCl 3 , BaCl 2 , BeCl 2 , BiCl 3 , CdCl 2 , CeCl 2 , CsCl 2 , CrCl 3 and H 2 PtCl 3 .
3. The etchant composition according to claim 1 , wherein the nitrate-based compound is at least one selected from the group consisting of NH 4 NO 3 , KNO 3 , LiNO 3 , Ca(NO 3 ) 2 , NaNO 3 , Zn(NO 3 ) 2 , Co(NO 3 ) 2 , Ni(NO 3 ) 2 , Fe(NO 3 ) 3 , Cu(NO 3 ) 2 and Ba(NO 3 ) 2 .
4. The etchant composition according to claim 1 , wherein the sulfate-based compound is at least one selected from the group consisting of H 2 SO 4 , Na 2 SO 4 , Na 2 S 2 O 8 , K 2 SO 4 , K 2 S 2 O 8 , CaSO 4 , (NH 4 ) 2 SO 4 and (NH 4 ) 2 S 2 O 8 .
5. The etchant composition according to claim 1 , wherein the oxidation regulator is at least one selected from the group consisting of KMnO 4 , K 2 CrO 7 , NaClO, NaClO 2 , NaClO 3 , NaClO 4 , HClO 4 and HIO 4 .