Organic field effect transistor and method of manufacturing the same
View Patent ↗The present invention discloses an organic field effect transistor and a manufacturing method thereof. The organic field effect transistor comprises a top-contact type or a bottom-contact type, and the manufacturing method thereof comprises the following steps: a substrate is provided, a metal gate is formed on the substrate, an inorganic insulating layer is formed on the substrate and the metal gate, a surface of the insulating layer is polished, an organic filler is filled in pores on the insulating layer as an insulating treatment, a modified layer is formed on the inorganic insulating layer, and finally an organic semiconductor layer, a source and a drain are formed. By combining the advantages of simply liquefied process of the organic material and the high stability of inorganic material, and operation conditions of control process, the present invention can achieve effectively that the device is high carrier mobility and high on/off ratio.
1. A manufacturing method of an organic field effect transistor, comprising the following steps:
(S 1 ) providing a substrate;
(S 2 ) forming a metal gate on the substrate;
(S 3 ) forming an inorganic insulating layer on the substrate and the metal gate;
(S 4 ) performing a polishing treatment for a surface of the inorganic insulating layer;
(S 5 ) performing an insulating treatment by an organic filler for the inorganic insulating layer;
(S 6 ) forming a modified layer on the inorganic insulating layer;
(S 7 ) forming an organic semiconductor layer on the modified layer; and
(S 8 ) depositing a metal to form a source and a drain.
2. The manufacturing method as claimed in claim 1 , wherein the substrate is selected from the group consisting of a glass substrate, a plastic substrate, a soft and flexible substrate, and a substrate formed of a material with a water/oxygen resistant property.
3. The manufacturing method as claimed in claim 1 , wherein the metal gate is formed using a metal selected from the group consisting of chromium (Cr) and other metals of which RMS is smaller than 1 nanometer.
4. The manufacturing method as claimed in claim 1 , wherein the inorganic insulating layer is selected from the group consisting of silicon dioxide (SiO 2 ) and silicon nitride (Si 3 N 4 ).
5. The manufacturing method as claimed in claim 1 , wherein the organic filler is selected from the group consisting of polyvinylpyrrolidone (PVP) and polymethylmethacrylate (PMMA).
6. The manufacturing method as claimed in claim 1 , further comprising proceeding surface treatment of the inorganic insulating layer by using a UV/ozone method and an oxygen plasma method before the step S 6 .
7. The manufacturing method as claimed in claim 1 , wherein, in the step S 6 , the modified layer is formed on the inorganic insulating layer by proceeding a surface treatment of the inorganic insulating layer using a material selected from the group consisting of hexamethyldisilazane (HMDS) and octadecyltrichlorosilane (OTS).
8. The manufacturing method as claimed in claim 1 , wherein the organic semiconductor layer is composed of a material selected from the group consisting of a small molecular material, a polymeric material, and an organic material with high carrier mobility.
9. The manufacturing method as claimed in claim 8 , wherein the small molecular material is pentacene.
10. The manufacturing method as claimed in claim 8 , wherein the polymeric material is selected from the group consisting of derivatives of thiophene, and poly(3-hexylthiophene-2,5-diyl) (P3HT).
11. The manufacturing method as claimed in claim 1 , wherein the step S 8 is further performed after the step S 6 to form a top-contact type field effect transistor.