Template having alignment marks formed of contrast material
View Patent ↗Imprint lithography substrates may include alignment marks formed of high contrast material. Exemplary methods for forming alignment marks having high contrast material are described.
1. A method of patterning an imprint nano-lithography substrate, comprising:
patterning a first portion of the substrate with a plurality of recessions and a plurality of protrusions;
patterning a second portion of the substrate with at least one alignment mark, at least a portion of the alignment mark being formed of high contrast material, wherein the patterning of the second portion includes depositing high contrast material on the alignment mark and wherein the high contrast material is localized solely at a patterning surface of the alignment mark; and,
wherein the first portion of the substrate and the second portion of the substrate are patterned within the same step.
2. The method of claim 1 , wherein an etch depth of the first portion of the substrate is independent of an etch depth of the second portion of the substrate.
3. The method of claim 2 , wherein patterning of the first portion of the substrate further includes applying a resist layer in superimposition with the second portion of the substrate such that the etch depth of the first portion of the substrate is independent of the etch depth of the second portion of the substrate.
4. The method of claim 1 , wherein the alignment mark includes a protective layer positioned adjacent to the high contrast material.
5. The method of claim 4 , wherein the protective layer is an oxide layer.
6. The method of claim 1 , wherein the substrate includes the high contrast material and patterning of the second portion includes etching of substrate including the high contrast material to form the alignment mark.
7. The method of claim 6 , wherein the substrate further includes a hard mask layer.
8. The method of claim 1 , wherein the alignment marks are fragmented.
9. The method of claim 8 , wherein the alignment marks are fragmented by line space.
10. The method of claim 8 , wherein the alignment marks are fragmented in a square grid pattern.
11. The method of claim 1 , wherein formation of the alignment marks are staggered in a lock and key arrangement on an imprint field.
12. The method of claim 1 , wherein the first portion of the substrate and the second portion of the substrate are patterned to form a replica template.
13. The method of claim 1 , wherein the substrate is a nano-lithographic template.
14. The method of claim 1 , wherein at least a portion of the protrusions include high contrast material.
15. A method of patterning an imprint nano-lithography substrate, comprising:
patterning a first portion of the substrate with a plurality of recessions and a plurality of protrusions;
patterning a second portion of the substrate with at least one alignment mark, at least a portion of the alignment mark being formed of high contrast material, wherein the high contrast material is localized solely at a patterning surface of the alignment mark;
patterning a sidewall on the substrate; and,
wherein the first portion of the substrate and the second portion of the substrate are patterned within the same step.
16. The method of claim 15 , wherein the sidewall is patterned on the substrate prior to patterning of the first portion of the substrate.
17. The method of claim 15 , wherein the sidewall is patterned on the substrate subsequent to patterning of the first portion of the substrate.