IP Library Granted Patent US 8,086,327
Granted Patent B2
US 8,086,327 · App. 12/466,098 · Granted Dec 27, 2011

Methods and apparatus for automated predictive design space estimation

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Quick Facts
Patent No.
US 8,086,327
App. No.
12/466,098
Granted
Dec 27, 2011
Kind
B2
Abstract

Described are computer-based methods and apparatuses, including computer program products, for automated predictive design space estimation. A design space of input factors and output responses is estimated for a physical process. Data is received for one or more input factors for a physical process, one or more output responses for the process, and criteria. For each of the one or more input factors, a calculated range of input values within the corresponding experimented range of input values is calculated. A modified range of input values is calculated for each of the one or more input factors. A design space estimate is predicted based at least on the modified ranges of input values, wherein the modified ranges of input values each comprise a largest region of variability for one or more of the input factors where the criteria are fulfilled.

Claims (103)

1. A computerized method for estimating a design space of input factors and output responses for a physical process, comprising:

(a) receiving, via a processor, data for one or more input factors for a physical process, one or more output responses for the process, and criteria, the criteria comprising:

a target response criterion for each of the one or more output responses;

an estimated optimal value for each of the one or more input factors to achieve the target response criteria; and

an experimented range of input values for each of the one or more input factors, where each input value in the experimented range of input values is determinative of an output response value for each of the one or more output responses;

(b) calculating, using the processor, for each of the one or more input factors, a calculated range of input values within the corresponding experimented range of input values, wherein calculating comprises:

selecting a first range of input values for each of the one or more input factors;

predicting values of the one or more output responses based on the first range of input values to determine a first performance metric for each of the one or more output responses; and

creating the calculated range of input values for each of the one or more input factors by adjusting the first range of input values based on a comparison of the first performance metric and a predetermined performance metric;

(c) calculating, using the processor, a modified range of input values for each of the one or more input factors, comprising, for each input factor of the one or more input factors:

selecting a second range of input values by expanding the calculated range of input values by a predetermined percentage;

predicting values of the one or more output responses based on the second range of input values to determine a second performance metric for each of the one or more output responses; and

creating the modified range of input values for the input factor by adjusting the second range of input values based on a comparison of the second performance metric and the predetermined performance metric; and

(d) predicting, using the processor, a design space estimate based at least on the modified ranges of input values, wherein the modified ranges of input values each comprise a largest region of variability where the criteria are fulfilled for one or more of the input factors.

2. The method of claim 1 , wherein the design space estimate further comprises a distribution of output response values for each of the one or more output responses, wherein the modified ranges of input values are determinative of the distribution of output response values.

3. The method of claim 2 , wherein for each of the one or more output responses, a prespecified number of output response values within the distribution of output response values are within predetermined limit values for the output response if the predetermined performance metric is satisfied.

4. The method of claim 1 , wherein predicting the design space estimate comprises predicting an individual largest region of variability for each input factor while any remaining input factors are set to their associated estimated optimal value.

5. The method of claim 1 , wherein predicting the design space estimate comprises predicting a combined largest region of variability for each input factor, wherein values of each of the one or more input factors can be anywhere within the corresponding combined largest region of variability and satisfy the predetermined performance metric for each output response.

6. The method of claim 1 , wherein creating the calculated range of input values comprises selecting a third range of input values by reducing the first range of input values by a predetermined percentage if the first performance metric is below the predetermined performance metric.

7. The method of claim 6 , further comprising:

predicting values of the one or more output responses based on the third range of input values to determine a third performance metric for each of the one or more output responses; and

creating the calculated range of input values for each of the one or more input factors by adjusting the third range of input values based on a comparison of the third performance metric and the predetermined performance metric.

8. The method of claim 1 , wherein creating the calculated range of input values comprises the following steps if the first performance metric is above the predetermined performance metric:

setting a step size to a predetermined percentage of a size of the second range of input values;

selecting a third range of input values by expanding the first range of input values based on the step size;

predicting values of the one or more output responses based on the third range of input values to determine a third performance metric for each of the one or more output responses; and

creating the calculated range of input values for each of the one or more input factors by adjusting the third range of input values based on a comparison of the third performance metric and the predetermined performance metric.

9. The method of claim 8 , wherein creating the calculated range of input values comprises the following steps if the third performance metric is below the predetermined performance metric:

selecting a fourth range of input values by expanding the third range of input values based on the step size;

predicting values of the one or more output responses based on the fourth range of input values to determine a fourth performance metric for each of the one or more output responses; and

creating the calculated range of input values for each of the one or more input factors by adjusting the fourth range of input values based on a comparison of the fourth performance metric and the predetermined performance metric.

10. The method of claim 8 , wherein creating the calculated range of input values comprises the following steps if the third performance metric is above the predetermined performance metric:

setting the third range of input values equal to the first range of input values;

reducing the step size by a predetermined percentage;

selecting a fourth range of input values by expanding the third range of input values based on the step size;

predicting values of the one or more output responses based on the fourth range of input values to determine a fourth performance metric for each of the one or more output responses; and

creating the calculated range of input values for each of the one or more input factors by adjusting the fourth range of input values based on a comparison of the fourth performance metric and the predetermined performance metric.

11. The method of claim 1 , wherein creating the modified range of input values comprises the following steps if the second performance metric is above the predetermined performance metric:

setting the modified range of input values equal to the second range of input values; and

associating a completion flag with the input factor.

12. The method of claim 1 , wherein creating the modified range of input values comprises the following steps if the second performance metric is below the predetermined performance metric:

selecting a third range of input values by expanding the second range of input values by a step size, wherein the step size was used to select the second range of input values;

predicting values of the one or more output responses based on the third range of input values to determine a third performance metric for each of the one or more output responses; and

creating the modified range of input values for the input factor by adjusting the third range of input values based on a comparison of the third performance metric and the predetermined performance metric.

13. The method of claim 1 , wherein calculating the modified range of input values for each of the one or more input factors further comprises the following steps:

determining each of the one or more input factors are associated with a completion flag;

reducing a step size used to select the second range of input values by a predetermined percentage; and

for each of the one or more input factors of the one or more input factors:

selecting a third range of input values by expanding the second range of input values by the step size;

predicting values of the one or more output responses based on the third range of input values to determine a third performance metric for each of the one or more output responses; and

creating the modified range of input values for the input factor by adjusting the third range of input values based on a comparison of the third performance metric and the predetermined performance metric.

14. The method of claim 1 , wherein:

predicting the values of the one or more output responses comprises performing a Monte Carlo simulation; and

the first performance metric, the second performance metric, and the predetermined performance metric are a measure of the number of values of the one or more output responses within predetermined limit values.

15. The method of claim 1 , wherein selecting the first range of input values for each of the one or more input factors comprises setting the first range of input values to a predetermined percentage of a lower outer bound value of the corresponding input factor.

16. The method of claim 1 , further comprising the following steps:

receiving a constraint for the one or more input factors; and

predicting values of the one or more output responses based on the first range of input values further comprises adjusting the prediction to compensate for the constraint.

17. The method of claim 16 wherein the constraint comprises a user defined limit on one or more input factors, a factor distribution, or any combination thereof.

18. The method of claim 1 , wherein the target response criterion for each of the one or more output responses comprises a target response value, a range of acceptable target response values, or a critical target response value, where the output response can either be above or below the critical target response value.

19. The method of claim 1 , wherein the physical process comprises a manufacturing process, an industrial process, a design project, a semiconductor project, or any combination thereof.

20. An apparatus for estimating a design space of input factors and output responses for a physical process, comprising a processor configured to:

(a) receive data for one or more input factors for a physical process, one or more output responses for the process, and criteria, the criteria comprising:

a target response criterion for each of the one or more output responses;

an estimated optimal value for each of the one or more input factors to achieve the target response criteria; and

an experimented range of input values for each of the one or more input factors, where each input value in the experimented range of input values is determinative of an output response value for each of the one or more output responses;

(b) calculate, for each of the one or more input factors, a calculated range of input values within the corresponding experimented range of input values, wherein calculating comprises:

selecting a first range of input values for each of the one or more input factors;

predicting values of the one or more output responses based on the first range of input values to determine a first performance metric for each of the one or more output responses; and

creating the calculated range of input values for each of the one or more input factors by adjusting the first range of input values based on a comparison of the first performance metric and a predetermined performance metric;

(c) calculate a modified range of input values for each of the one or more input factors, comprising, for each input factor of the one or more input factors:

selecting a second range of input values by expanding the calculated range of input values by a predetermined percentage;

predicting values of the one or more output responses based on the second range of input values to determine a second performance metric for each of the one or more output responses; and

creating the modified range of input values for the input factor by adjusting the second range of input values based on a comparison of the second performance metric and the predetermined performance metric; and

(d) predict a design space estimate based at least on the modified ranges of input values, wherein the modified ranges of input values each comprise a largest region of variability where the criteria are fulfilled for one or more of the input factors.

21. A computer program product, tangibly embodied in a computer-readable storage device, the computer program product including instructions being operable to cause a data processing apparatus to:

(a) receive data for one or more input factors for a physical process, one or more output responses for the process, and criteria, the criteria comprising:

a target response criterion for each of the one or more output responses;

an estimated optimal value for each of the one or more input factors to achieve the target response criteria; and

an experimented range of input values for each of the one or more input factors, where each input value in the experimented range of input values is determinative of an output response value for each of the one or more output responses;

(b) calculate, for each of the one or more input factors, a calculated range of input values within the corresponding experimented range of input values, wherein calculating comprises:

selecting a first range of input values for each of the one or more input factors;

predicting values of the one or more output responses based on the first range of input values to determine a first performance metric for each of the one or more output responses; and

creating the calculated range of input values for each of the one or more input factors by adjusting the first range of input values based on a comparison of the first performance metric and a predetermined performance metric;

(c) calculate a modified range of input values for each of the one or more input factors, comprising, for each input factor of the one or more input factors:

selecting a second range of input values by expanding the calculated range of input values by a predetermined percentage;

predicting values of the one or more output responses based on the second range of input values to determine a second performance metric for each of the one or more output responses; and

creating the modified range of input values for the input factor by adjusting the second range of input values based on a comparison of the second performance metric and the predetermined performance metric; and

(d) predict a design space estimate based at least on the modified ranges of input values, wherein the modified ranges of input values each comprise a largest region of variability where the criteria are fulfilled for one or more of the input factors.

22. A system for estimating a design space of input factors and output responses for a physical process, the system comprising:

(a) means for receiving data for one or more input factors for a physical process, one or more output responses for the process, and criteria, the criteria comprising:

a target response criterion for each of the one or more output responses;

an estimated optimal value for each of the one or more input factors to achieve the target response criteria; and

an experimented range of input values for each of the one or more input factors, where each input value in the experimented range of input values is determinative of an output response value for each of the one or more output responses;

(b) means for calculating, for each of the one or more input factors, a calculated range of input values within the corresponding experimented range of input values, wherein calculating comprises:

selecting a first range of input values for each of the one or more input factors;

predicting values of the one or more output responses based on the first range of input values to determine a first performance metric for each of the one or more output responses; and

creating the calculated range of input values for each of the one or more input factors by adjusting the first range of input values based on a comparison of the first performance metric and a predetermined performance metric;

(c) means for calculating a modified range of input values for each of the one or more input factors, comprising, for each input factor of the one or more input factors:

selecting a second range of input values by expanding the calculated range of input values by a predetermined percentage;

predicting values of the one or more output responses based on the second range of input values to determine a second performance metric for each of the one or more output responses; and

creating the modified range of input values for the input factor by adjusting the second range of input values based on a comparison of the second performance metric and the predetermined performance metric; and

(d) means for predicting a design space estimate based at least on the modified ranges of input values, wherein the modified ranges of input values each comprise a largest region of variability where the criteria are fulfilled for one or more of the input factors.

Assignments (9)
RELEASE OF SECURITY INTEREST Recorded Aug 24, 2022
From: BARCLAYS BANK PLC
To: MKS INSTRUMENTS, INC.; NEWPORT CORPORATION; ELECTRO SCIENTIFIC INDUSTRIES, INC.
Reel/Frame 062739/0001 →
PARTIAL RELEASE OF SECURITY INTEREST Recorded Jul 11, 2019
From: BARCLAYS BANK PLC
To: MKS INSTRUMENTS, INC.
Reel/Frame 049728/0509 →
RELEASE OF SECURITY INTEREST Recorded Feb 1, 2019
From: DEUTSCHE BANK AG NEW YORK BRANCH
To: MKS INSTRUMENTS, INC.; NEWPORT CORPORATION
Reel/Frame 048226/0095 →
CHANGE OF NAME Recorded Oct 23, 2017
From: MKS INSTRUMENTS AB
To: SARTORIUS STEDIM DATA ANALYTICS AB
Reel/Frame 044256/0882 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Oct 18, 2017
From: SARTORIUS STEDIM BIOTECH GMBH
To: MKS INSTRUMENTS AB
Reel/Frame 043888/0860 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Sep 19, 2017
From: MKS INSTRUMENTS, INC
To: SARTORIUS STEDIM BIOTECH GMBH
Reel/Frame 043630/0870 →
SECURITY AGREEMENT Recorded May 4, 2016
From: MKS INSTRUMENTS, INC.; NEWPORT CORPORATION
To: BARCLAYS BANK PLC; BARCLAYS BANK PLC
Reel/Frame 038663/0139 →
SECURITY AGREEMENT Recorded May 4, 2016
From: MKS INSTRUMENTS, INC.; NEWPORT CORPORATION
To: DEUTSCHE BANK AG NEW YORK BRANCH
Reel/Frame 038663/0265 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Aug 11, 2009
From: WIKSTROM, ERNST CONNY; SUNDSTROM, HANS GEORG JOAKIM; NORDAHL, TORD AKE BORJE
To: MKS INSTRUMENTS, INC.
Reel/Frame 023076/0324 →