Fabrication method of multi-domain vertical alignment pixel structure
A fabrication method of a multi-domain vertical alignment pixel structure includes providing a substrate, forming a gate on the substrate, and forming an insulating layer on the substrate. A channel layer and a semiconductor layer are formed on the insulating layer. A source, a drain, and a capacitor-coupling electrode are formed. A passivation layer is formed to cover the source, the drain, a part of the channel layer, and a part of the semiconductor layer. A via hole is formed in the passivation layer to expose the drain, and a trench is formed in the passivation layer and the insulating layer. A lateral etched groove on the sidewall of the trench is formed to expose the side edge of the semiconductor layer. A first pixel electrode and a second pixel electrode are formed on the passivation layer at both sides of the trench, respectively.
1. A fabrication method of a multi-domain vertical alignment pixel structure, comprising:
providing a substrate;
forming a gate on the substrate;
forming an insulating layer on the substrate to cover the gate;
forming a channel layer and a semiconductor layer on the insulating layer, wherein the channel layer is located over the gate;
forming a source and a drain and a capacitor-coupling electrode on the substrate, wherein the source and the drain are located on the channel layer and at both sides of the gate, respectively;
forming a passivation layer to cover the source, the drain, a part of the channel layer and a part of the semiconductor layer;
forming a via hole in the passivation layer to expose the drain, and forming a trench in the passivation layer and the insulating layer and forming a lateral etched groove located on the sidewall of the trench to expose the side edge of the semiconductor layer;
forming a first pixel electrode and a second pixel electrode on the passivation layer at both sides of the trench, respectively, wherein the first pixel electrode is electrically connected to the drain through the via hole, while the second pixel electrode is electrically insulated from the first pixel electrode, and the capacitor-coupling electrode is located between the second pixel electrode and the substrate.
2. The fabrication method according to claim 1 , wherein a method for forming the trench comprises using an etchant to remove a part of the passivation layer, a part of the semiconductor layer and a part of the insulating layer, wherein the etchant has an etching rate on the semiconductor layer higher than an etching rate on the passivation layer and on the insulating layer.
3. The fabrication method according to claim 1 , further comprising forming a storage capacitor on the substrate, wherein the storage capacitor is electrically connected to the drain.
4. The fabrication method according to claim 1 , wherein a method for forming the storage capacitor comprises:
forming a first capacitor electrode; and
forming a second capacitor electrode over the first capacitor electrode, wherein the second capacitor electrode is electrically connected to the drain.
5. The fabrication method according to claim 4 , wherein the first capacitor electrode and the gate are formed simultaneously, while the second capacitor electrode and the source and the drain are formed simultaneously.
6. The fabrication method according to claim 1 , wherein the capacitor-coupling electrode and the source and the drain are formed simultaneously.
7. The fabrication method according to claim 1 , further comprising forming an ohmic contact layer between the channel layer and the source/drain.
8. A fabrication method of a multi-domain vertical alignment pixel structure, comprising:
providing a substrate;
forming a gate on the substrate;
forming an active device, a dielectric layer, a capacitor-coupling electrode and a lateral etched material layer on the substrate, wherein the capacitor-coupling electrode and the lateral etched material layer are located in the dielectric layer;
forming a via hole and a trench in the dielectric layer and forming a lateral etched groove on the sidewall of the trench to expose the side edge of the lateral etched material layer; and
forming a first pixel electrode and a second pixel electrode on the dielectric layer at both sides of the trench, respectively, wherein the first pixel electrode is electrically connected to the active device through the via hole, while the second pixel electrode is electrically insulated from the first pixel electrode and located over the capacitor-coupling electrode.