Optical phase shifting plate
View Patent ↗An optical phase shifting plate includes: an optical substrate configured to change a refractive index for light which passes through the optical substrate by a thermooptical effect; a thin-film heater formed on a surface of the optical substrate; a wiring member disposed to be substantially perpendicular to the surface of the optical substrate; an intermediate member disposed between the optical substrate and the wiring member, the intermediate member having: a first surface that is substantially flush with a surface of the thin-film heater; and a second surface that is substantially flush with a surface of the wiring member and that is perpendicularly adjacent to the first surface, a first bonding wire which electrically connects the surface of the thin-film heater to the first surface of the intermediate member; and a second bonding wire which electrically connects the surface of wiring member to the second surface of the intermediate member.
1. An optical phase shifting plate comprising:
an optical substrate configured to change a refractive index for light which passes through the optical substrate by means of a thermooptical effect;
a thin-film heater formed on a surface of the optical substrate;
a wiring member disposed to be substantially perpendicular to the surface of the optical substrate;
an intermediate member disposed between the optical substrate and the wiring member, the intermediate member comprising:
a first surface that is substantially flush with a surface of the thin-film heater; and
a second surface that is substantially flush with a surface of the wiring member and that is perpendicularly adjacent to the first surface,
a first bonding wire which electrically connects the surface of the thin-film heater to the first surface of the intermediate member; and
a second bonding wire which electrically connects the surface of wiring member to the second surface of the intermediate member.
2. The optical phase shifting plate according to claim 1 ,
wherein the first and second surfaces are plated, and the intermediate member is a rectangular parallelepiped.
3. The optical phase shifting plate according to claim 1 ,
wherein an antireflection film is formed on incident and outgoing surfaces of the optical substrate.
4. The optical phase shifting plate according to claim 1 , further comprising:
a package which is made of a Kovar material and to which the wirings member and the intermediate member are fixed.
5. The optical phase shifting plate according to claim 1 , wherein the wiring member is made of an alumina material and the surface of the wiring member is gold plated.
6. The optical phase shifting plate according to claim 2 , wherein the first and second surfaces are gold plated.
7. The optical phase shifting plate according to claim 1 , wherein the thin-film heater is formed to surround a portion of the surface of the optical substrate that is away from light incident and outgoing surfaces of the optical substrate.
8. The optical phase shifting plate according to claim 1 , wherein the thin-film heater is formed to surround a peripheral edge portion of the surface of the optical substrate.
9. The optical phase shifting plate according to claim 1 ,
wherein the optical phase shifting plate is used for a Michelson interferometer or a Mach-Zehnder interferometer.