Organic light emitting device and method of manufacturing the same
View Patent ↗Provided are a method of manufacturing an organic light emitting device. The method includes forming an electron injection layer by vacuum co-depositing an organic semiconductor material having an electron mobility of about 1×10 −6 cm 2 /V·s or more in an electric field of about 1×10 6 V/m and a metal azide.
1. A method of manufacturing an organic light emitting device, comprising:
forming a first electrode on a substrate;
forming an organic layer on the first electrode; and
forming a second electrode on the organic layer, wherein
the forming of the organic layer comprises forming an electron injection layer (EIL) by vacuum co-depositing an organic semiconductor material having an electron mobility of about 1×10 −6 cm 2 /V·s or more in an electric field of about 1×10 6 V/m and a metal azide represented by Formula 1:
M(N 3 ) x <Formula 1>
where M is selected from the group consisting of an alkali metal, an alkaline earth metal, and a lanthanide-based metal; and
x is 1, 2, or 3.
2. The method of manufacturing an organic light emitting device according to claim 1 , wherein the vacuum co-depositing is performed at a pressure of about 10 −10 torr to about 10 −3 torr.
3. The method of manufacturing an organic light emitting device according to claim 1 , wherein the vacuum co-depositing is performed at a temperature of about 350° C. or lower.
4. The method of manufacturing an organic light emitting device according to claim 1 , wherein the organic semiconductor material comprises an electron transporting material or a host that is used in an emission layer.
5. The method of manufacturing an organic light emitting device according to claim 1 , wherein the organic semiconductor material comprises at least one material selected from the group consisting of tris(8-quinolinolate)aluminum(Alq 3 ), TAZ, TPQ1, TPQ2, 4,7-diphenyl-1,10-phenanthroline (Bphen), BCP, BeBq 2 , BAlq, 4,4′-N,N′-dicarbazole-biphenyl (CBP), 9,10-di(naphthalene-2-yl)anthracene(ADN), 4,4 ′, 4″-tris(N-carbazolyl)triphenylamine (TCTA), 1,3,5-tris(N-phenylbenzimidazole-2-yl)benzene (TPBI), 3-tert-butyl-9,10-di(naphth-2-yl) anthracene (TBADN), and E3:
6. The method of manufacturing an organic light emitting device according to claim 1 , wherein the metal azide is selected from the group consisting of NaN 3 , KN 3 , RbN 3 , and CsN 3 .
7. The method of manufacturing an organic light emitting device according to claim 1 , wherein the organic semiconductor material and the metal azide are simultaneously vacuum co-deposited in an organic deposition device.
8. The method of manufacturing an organic light emitting device according to claim 1 , wherein the content of the metal azide is about 0.2 volume% to about 50 volume% based on the total volume of the EIL.
9. The method of manufacturing an organic light emitting device according to claim 1 , wherein the forming of the organic layer further comprises forming a hole injection layer by co-depositing an inorganic semiconductor material and an organic hole injectable material, wherein
the inorganic semiconductor material is selected from the group consisting of MoO 3 , V 2 O 5 and WO 3 .
10. An organic light emitting device comprising: a substrate; a first electrode; a second electrode; and an organic layer interposed between the first electrode and the second electrode, wherein
the organic layer comprises an electron injection layer (EIL), wherein
the EIL is formed by vacuum co-depositing an organic semiconductor material having an electron mobility of about 1×10 −6 cm 2 /V·s or more in an electric field of about 1×10 6 V/m and a metal azide represented by Formula 1:
M(N 3 ) x <Formula 1>
where M is selected from the group consisting of an alkali metal, an alkaline earth metal, and a lanthanide-based metal; and
x is 1, 2, or 3.
11. The organic light emitting device of claim 10 , wherein the organic semiconductor material comprises an electron transporting material or a host that is used in an emission layer.
12. The organic light emitting device of claim 10 , wherein the organic semiconductor material comprises at least one material selected from the group consisting of tris(8-quinolinolate)aluminum (Alq 3 ), TAZ, TPQ1, TPQ2, 4,7-diphenyl-1,10-phenanthroline (Bphen), BCP, BeBq 2 , BAlq, 4,4′-N,N′-dicarbazole-biphenyl (CBP), 9,10-di(naphthalene-2-yl) anthracene (ADN), 4,4′,4″-tris(N-carbazolyl)triphenylamine (TCTA), 1,3,5-tris(N-phenylbenzimidazole -2-yl)benzene (TPBI), 3-tert-butyl-9,10-di(naphth-2-yl)anthracene (TBADN), and E3:
13. The organic light emitting device of claim 10 , wherein the metal azide is selected from the group consisting of NaN 3 , KN 3 , RbN 3 and CsN 3 .
14. The organic light emitting device of claim 10 , wherein the EIL comprises at least one material selected from the group consisting of: a metal , a metal oxide and a metal azide.
15. The organic light emitting device of claim 10 , wherein the organic layer further comprises a hole injection layer comprising an inorganic semiconductor material and an organic hole injectable material, wherein
the inorganic semiconductor material is selected from the group consisting of MoO 3 , V 2 O 5 , and WO 3 .
16. The organic light emitting device of claim 14 , wherein the metal is selected from the group consisting of an alkali metal, an alkaline earth metal, and a lanthanide-based metal, the metal oxide is selected from the group consisting of an alkali metal oxide, an alkaline earth metal oxide, and a lanthanide-based metal oxide; and the metal azide is selected from the group consisting of an alkali metal azide, an alkaline earth metal azid, and an lanthanide-based metal azide.
17. A method of manufacturing an organic light emitting device, comprising:
forming a first electrode on a substrate;
forming a hole injection layer (HIL) on the first electrode;
forming a hole transport layer (HTL) on the HIL;
forming an emission layer (EML) on the HIL;
forming an electron transport layer (ETL) on the EML;
forming an electron injection layer (EIL) on the ETL; and
forming a second electrode on the EIL, wherein
the EIL is formed by vacuum co-depositing an organic semiconductor material having an electron mobility of about 1×10 −6 cm 2 /V·s or more in an electric field of about 1×10 6 V/m and a metal azide represented by Formula 1:
M(N 3 ) x <Formula 1>
where M is selected from the group consisting of an alkali metal, an alkaline earth metal, and a lanthanide-based metal; and
x is 1, 2, or 3.
18. The method of manufacturing an organic light emitting device according to claim 17 , wherein the EIL is formed by co-depositing 4,7-diphenyl-1,10-phenanthroline (Bphen) and CsN 3 on the ETL:
19. The method of manufacturing an organic light emitting device according to claim 17 , wherein the vacuum co-depositing is performed at a pressure of 10 −10 torr to 10 −10 torr.
20. The method of manufacturing an organic light emitting device according to claim 17 , wherein the vacuum co-depositing is perfoinied at a temperature of 350° C. or lower.