Method of depositing materials on a non-planar surface
View Patent ↗A method of depositing materials on a non-planar surface is disclosed. The method is effectuated by rotating non-planar substrates as they travel down a translational path of a processing chamber. As the non-planar substrates simultaneously rotate and translate down a processing chamber, the rotation exposes the whole or any desired portion of the surface area of the non-planar substrates to the deposition process, allowing for uniform deposition as desired. Alternatively, any predetermined pattern is able to be exposed on the surface of the non-planar substrates. Such a method effectuates manufacture of non-planar semiconductor devices, including, but not limited to, non-planar light emitting diodes, non-planar photovoltaic cells, and the like.
1. An apparatus for semiconductor processing onto a non-planar substrate, comprising:
a. a hermetically sealable semiconductor process chamber having an ingress and an egress, wherein the ingress and egress are operable to allow passage of at least one non-planar substrate therethrough;
b. means adapted and configured for moving the at least one non-planar substrate down a translational path through the semiconductor process chamber;
c. means adapted and configured for maintaining contact with and controllably rotating the at least one non-planar substrate as the non-planar substrate moves down the translational path through the semiconductor process chamber; and
d. means for performing a semiconductor process on the at least one non-planar substrate concurrently with the rotation of the at least one non-planar substrate down the translational path such that at least a portion of the surface area of the at least one non-planar substrate is exposed to the semiconductor process.
2. The apparatus of claim 1 wherein a path between the ingress and egress is the translational path.
3. The apparatus of claim 1 , further comprising a tray loadable with the at least one non-planar substrate and a plurality of other non-planar substrates for increased throughput, wherein the ingress is configured to permit passage of the tray and the means for moving the at least one non-planar substrate are adapted and configured to move said tray down the translational path.
4. The apparatus of claim 1 wherein a rate of rotation is determined as a function of variables from among a list comprised of type and process temperature, deposited material, desired deposition thickness, ambient temperature within the process chamber, quality of a vacuum condition within the process chamber and desired deposition area.
5. The apparatus of claim 1 wherein a rate of translation is determined as a function of variables from among a list comprised of type and process temperature, deposited material, desired deposition thickness, ambient temperature within the process chamber, quality of a vacuum condition within the process chamber and desired deposition area.
6. The apparatus of claim 1 wherein the semiconductor process is any among a list comprised of sputter deposition, reactive sputter deposition and evaporation deposition.
7. The apparatus of claim 1 wherein the semiconductor process chamber comprises a deposition chamber.
8. The apparatus of claim 1 wherein the means for rotating are configured to rotate the at least one non-planar substrate about a lengthwise axis.
9. The apparatus of claim 1 wherein the means for performing the semiconductor process are adapted and configured to react with substantially all of the outer surface areas of the non-planar substrate.