IP Library Granted Patent US 9,567,691
Granted Patent B2
US 9,567,691 · App. 12/487,119 · Granted Feb 14, 2017

Melt purification and delivery system

Inventors: Peter L. Kellerman (Essex, MA); Frank Sinclair (Quincy, MA); Frederick Carlson (Potsdam, NY); Julian G. Blake (Gloucester, MA)
Assignee: Varian Semiconductor Equipment Associates, Inc.
C30B11/003C01B33/037C30B11/001C30B28/06C30B29/02C30B29/06C30B29/08C30B29/406C30B29/60
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Quick Facts
Patent No.
US 9,567,691
App. No.
12/487,119
Granted
Feb 14, 2017
Kind
B2
Abstract

An apparatus to purify a melt is disclosed. A first portion of a melt in a chamber is frozen in a first direction. A fraction of the first portion is melted in the first direction. A second portion of the melt remains frozen. The melt flows from the chamber and the second portion is removed from the chamber. The freezing concentrates solutes in the melt and second portion. The second portion may be a slug with a high solute concentration. This system may be incorporated into a sheet forming apparatus with other components such as, for example, pumps, filters, or particle traps.

Claims (34)

1. A method of purifying comprising:

providing a melt in a chamber, the chamber having a first end and second end;

translating a cooler and a heater that are external to the chamber along a first direction relative to the chamber from the first end toward the second end with the heater trailing the cooler;

freezing in said first direction a first portion of a melt in said chamber from the first end toward the second end;

melting a fraction of said first portion of said melt in said first direction from the first end toward the second end whereby a second portion of said melt remains frozen;

flowing said melt from said chamber; and

removing said second portion from said chamber.

2. The method of claim 1 , wherein said melt is selected from the group consisting of silicon, silicon and germanium, gallium, and gallium nitride.

3. The method of claim 1 , further comprising concentrating solutes in said melt and said second portion during said freezing.

4. The method of claim 1 , wherein said removing comprises dropping said second portion from said chamber.

5. The method of claim 1 , wherein said removing comprises melting said second portion and flowing said second portion from said chamber.

6. An apparatus for forming a sheet comprising:

a crucible configured to form a melt;

a first pump in fluid communication with said crucible;

a purifying system in fluid communication with said first pump, wherein the purifying system comprises:

a chamber defining a cavity, an inlet, and an outlet, the chamber having a first end and second end;

a cooler disposed external to the chamber;

a heater disposed external to the chamber; and

a translation mechanism configured to translate said cooler and said heater along a first direction relative to said chamber from the first end toward the second end with the heater trailing the cooler;

a second pump in fluid communication with said purifying system; and

a sheet forming apparatus configured to freeze said melt to form a sheet, said sheet forming apparatus in fluid communication with said second pump along a first path, said sheet forming apparatus comprising a vessel defining a channel configured to hold said melt and a cooling plate disposed above said melt.

7. The apparatus of claim 6 , wherein said sheet forming apparatus comprises a spillway and said melt and said sheet flow within said channel toward said spillway.

8. The apparatus of claim 6 , further comprising a filter.

9. The apparatus of claim 6 , further comprising a particle trap.

10. The apparatus of claim 6 , further comprising a third pump in fluid communication with said purifying system, wherein said sheet forming apparatus is in fluid communication with said third pump.

11. The apparatus of claim 6 , further comprising a second path between said sheet forming apparatus and said second pump, said second path configured to allow circulation of said melt to said sheet forming apparatus.

12. The apparatus of claim 6 , wherein said sheet forming apparatus is in fluid communication with said purifying system.

13. The apparatus of claim 6 , wherein said first pump and said second pump comprise:

the chamber, wherein the chamber defines a cavity configured to hold said melt;

a gas source in fluid communication with said chamber;

a first pipe in fluid communication with said chamber;

a second pipe in fluid communication with said chamber;

a first valve disposed between said first pipe and said chamber; and

a second valve disposed between said chamber and said second pipe.

Assignments (3)
ACQUISITION Recorded Jan 15, 2020
From: VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC.
To: APPLIED MATERIALS, INC.
Reel/Frame 051973/0106 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Dec 11, 2019
From: APPLIED MATERIALS, INC.
To: LEADING EDGE CRYSTAL TECHNOLOGIES, INC.
Reel/Frame 051247/0716 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jun 18, 2009
From: KELLERMAN, PETER L.; SINCLAIR, FRANK; CARLSON, FREDERICK; BLAKE, JULIAN G.
To: VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC.
Reel/Frame 022843/0968 →
Continuity (2)
Provisional Application 61074249 · Jun 20, 2008
Related Publication 20100050686A1 · Mar 4, 2010