IP Library Granted Patent US 9,881,999
Granted Patent B2
US 9,881,999 · App. 12/488,310 · Granted Jan 30, 2018

Methods of fabricating nanostructures and nanowires and devices fabricated therefrom

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Quick Facts
Patent No.
US 9,881,999
App. No.
12/488,310
Granted
Jan 30, 2018
Kind
B2
Abstract

One-dimensional nanostructures having uniform diameters of less than approximately 200 nm. These inventive nanostructures, which we refer to as “nanowires”, include single-crystalline homostructures as well as heterostructures of at least two single-crystalline materials having different chemical compositions. Because single-crystalline materials are used to form the heterostructure, the resultant heterostructure will be single-crystalline as well. The nanowire heterostructures are generally based on a semiconducting wire wherein the doping and composition are controlled in either the longitudinal or radial directions, or in both directions, to yield a wire that comprises different materials. Examples of resulting nanowire heterostructures include a longitudinal heterostructure nanowire (LOHN) and a coaxial heterostructure nanowire (COHN).

Claims (31)

1. A population of nanowires, comprising:

a plurality of nanowires, each comprising:

a core of a first semiconductor material at least partially surrounded by a sheath of a compositionally different material;

wherein at least one of said core and said sheath has a uniform diameter;

wherein said sheath material is synthesized; and

wherein the population of nanowires has a uniform interwire diameter of less than or equal to approximately 50% RMS across the population of nanowires.

2. A population of nanowires as recited in claim 1 , wherein said sheath comprises a non-amorphous material.

3. A population of nanowires as recited in claim 2 , wherein at least one of said core and said sheath comprises a crystalline material.

4. A population of nanowires as recited in claim 3 , wherein at least one of said core and said sheath comprises a monocrystalline material.

5. A population of nanowires as recited in claim 1 , wherein said at least one said core and said sheath has a diameter ranging from about 5 nm to about 50 nm.

6. A population of nanowires as recited in claim 1 , further comprising an electrode coupled to at least one of said core and said sheath.

7. A population of nanowires as recited in claim 1 , wherein said sheath comprises a crystalline material.

8. A population of nanowires as recited in claim 7 , wherein said crystalline material is monocrystalline.

9. A population of nanowires as recited as in claim 1 , comprising two or more sheath layers surrounding said core.

10. A population of nanowires as recited in claim 1 , wherein said core comprises at least first and second segments of compositionally different materials.

11. A population of nanowires as recited in claim 1 , wherein said sheath comprises a conformal carbon coating.

12. A population of nanowires as recited in claim 1 , wherein the sheath is selected from the group comprising: a metallic element, an oxide, a nitride, a selenide and a polymer.

13. A population of nanowires as recited in claim 1 , wherein the distribution of diameters within the population of nanowires is less than or equal to approximately 20% rms.

14. A population of nanowires as recited in claim 13 , wherein the distribution of diameters within the population of nanowires is less than or equal to approximately 10% rms.

15. A population of nanowires as recited in claim 1 , wherein the core comprises an inorganic material.

16. A population of nanowires as recited in claim 1 , wherein the core comprises silicon.

17. A population of nanowires as recited in claim 1 , wherein both the core and the sheath have a uniform diameter.

18. A population of nanowires, comprising:

a plurality of nanowires, each comprising:

a core of a first inorganic material at least partially surrounded by a sheath of a compositionally different material;

wherein at least one of said core and said sheath has a uniform diameter;

wherein said sheath material is synthesized; and

wherein the population of nanowires has a uniform interwire diameter of less than or equal to approximately 50% RMS across the population of nanowires.

19. A population of nanowires as recited in claim 18 , wherein the core comprises a semiconductor material.

20. A population of nanowires as recited in claim 19 , wherein the core comprises silicon.

21. A population of nanowires as recited in claim 18 , wherein both the core and the sheath have a uniform diameter.

Assignments (4)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jan 18, 2018
From: MAJUMDAR, ARUN; SHAKOURI, ALI; SANDS, TIMOTHY D.; YANG, PEIDONG; MAO, SAMUEL S.; RUSSO, RICHARD E.; FEICK, HENNING; KIND, HANNES; WEBER, EICKE R.; HUANG, MICHAEL; YAN, HAOQUAN; WU, YIYING; FAN, RONG
To: THE REGENTS OF THE UNIVERSITY OF CALIFORNIA
Reel/Frame 044658/0836 →
RELEASE OF SECURITY INTEREST Recorded Jun 12, 2013
From: NANOSYS, INC.
To: NANOSYS, INC.
Reel/Frame 030599/0907 →
SECURITY AGREEMENT Recorded Apr 25, 2013
From: PRVP HOLDINGS, LLC
To: NANOSYS, INC.
Reel/Frame 030285/0829 →
CONFIRMATORY LICENSE Recorded Dec 16, 2009
From: UNIVERSITY OF CALIFORNIA
To: ENERGY, UNITED STATES DEPARTMENT OF
Reel/Frame 023665/0708 →