Solid-state imaging device and electronic apparatus
View Patent ↗A solid-state imaging device includes: a photoelectric conversion portion; a floating diffusion region; a transfer gate electrode made of an n-type semiconductor; a sidewall made of an n-type semiconductor formed on the photoelectric conversion portion side of the transfer gate electrode through an insulating film; and a sidewall made of an insulating layer formed on the floating diffusion region side of the transfer gate electrode.
1. A solid-state imaging device comprising:
a photoelectric conversion portion;
a floating diffusion region;
a transfer gate electrode made of an n-type semiconductor;
a sidewall made of an n-type semiconductor formed on the photoelectric conversion portion side of the transfer gate electrode through an insulating film; and
a sidewall made of an insulating layer formed on the floating diffusion region side of the transfer gate electrode.
2. The solid-state imaging device according to claim 1 ,
wherein a surface of the photoelectric conversion portion under the sidewall made of the n-type semiconductor is in a pinning mode by charges which are opposite to signal charges by a gate voltage at the time of accumulating charges.
3. An electronic apparatus comprising:
a solid-state imaging device;
an optical system which guides incident light to photoelectric conversion portions of the solid-state imaging device; and
a signal processing circuit which processes output signals of the solid-state imaging device, and
wherein the solid-state imaging device includes
a photoelectric conversion portion,
a floating diffusion region,
a transfer gate electrode made of an n-type semiconductor,
a sidewall made of an n-type semiconductor formed on the photoelectric conversion portion side of the transfer gate electrode through an insulating film, and
a sidewall made of an insulating layer formed on the floating diffusion region side of the transfer gate electrode.
4. The electronic apparatus according to claim 3 ,
wherein, in the solid-state imaging device, a surface of the photoelectric conversion portion under the sidewall made of the n-type semiconductor is in a pinning mode by charges which are opposite to signal charges by a gate voltage at the time of accumulating charges.