Filter, duplexer and communication apparatus
A filter has a plurality of piezoelectric thin film resonators formed by sandwiching a piezoelectric film with a lower electrode disposed on a substrate and an upper electrode. Each of the piezoelectric thin film resonators has an electrode region formed with the upper electrode and the lower electrode overlapping each other, whose outline includes a curve. Among the plural piezoelectric thin film resonators, the piezoelectric thin film resonators in the opposing electrode regions of the adjacent piezoelectric thin film resonators are shaped to have outlines complementary to each other. With the filter, influences caused by transverse mode undesired wave of the piezoelectric thin film resonators can be suppressed. Therefore, miniaturization can be achieved without sacrificing the mechanical strength of electrodes having hollow structures.
1. A filter comprising a plurality of piezoelectric thin film resonators,
the piezoelectric thin film resonators each comprising:
a substrate;
a lower electrode disposed on the substrate;
a piezoelectric film disposed on the substrate and on the lower electrode; and
an upper electrode disposed on the piezoelectric film so as to have a part opposing the lower electrode;
wherein an electrode region where the upper electrode and the lower electrode overlap each other is shaped to be cornerless or have all of its corners rounded, and to have at least one pair of opposing perimeters that are unparallel to each other, the electrode region being further shaped to be substantially linear symmetric about a symmetric axis that is perpendicular to a direction of current flowing through the piezoelectric thin film resonator in a plan view;
any one of the pair of perimeters opposes an electrode region of an adjacent piezoelectric thin film resonator;
spacing between the perimeter and the opposing perimeter of the electrode region of the adjacent piezoelectric thin film resonator is constant; and
the symmetric axis of one of the plurality of piezoelectric thin film resonators is substantially parallel to the symmetric axis of at least another one of the plurality of piezoelectric thin film resonators.
2. The filter according to claim 1 , wherein adjacent piezoelectric thin film resonators among the plural piezoelectric thin film resonators have opposing electrode regions shaped to be complimentary to each other.
3. The filter according to claim 1 , wherein the perimeter of the electrode region includes a curve.
4. The filter according to claim 1 , wherein the plurality of piezoelectric thin film resonators are connected in series.
5. The filter according to claim 4 , wherein the symmetric axes of all of the plurality of piezoelectric thin film resonators connected in series are substantially parallel to each other.
6. The filter according to claim 1 , wherein the plurality of piezoelectric thin film resonators are connected in parallel.
7. A duplexer comprising a transmission filter and a reception filter, the transmission filter and/or reception filter comprise a plurality of piezoelectric thin film resonators,
the piezoelectric thin film resonators each comprising:
a substrate;
a lower electrode disposed on the substrate;
a piezoelectric film disposed on the substrate and on the lower electrode; and
an upper electrode disposed on the piezoelectric film so as to have a part opposing the lower electrode;
wherein an electrode region where the upper electrode and the lower electrode overlap each other is shaped to be cornerless or have all of its corners rounded, and to have at least one pair of opposing perimeters that are unparallel to each other, the electrode region being further shaped to be substantially linear symmetric about a symmetric axis that is perpendicular to a direction of current flowing through the piezoelectric thin film resonator in a plan view;
any one of the pair of perimeters opposes an electrode region of an adjacent piezoelectric thin film resonator;
spacing between the perimeter and the opposing perimeter of the electrode region of the adjacent piezoelectric thin film resonator is constant; and
the symmetric axis of one of the plurality of piezoelectric thin film resonators is substantially parallel to the symmetric axis of at least another one of the plurality of piezoelectric thin film resonators.
8. A communication apparatus comprising a transmission filter and a reception filter, the transmission filter and/or reception filter comprise a plurality of piezoelectric thin film resonators,
the piezoelectric thin film resonators each comprising:
a substrate;
a lower electrode disposed on the substrate;
a piezoelectric film disposed on the substrate and on the lower electrode; and
an upper electrode disposed on the piezoelectric film so as to have a part opposing the lower electrode;
wherein an electrode region where the upper electrode and the lower electrode overlap each other is shaped to be cornerless or have all of its corners rounded, and to have at least one pair of opposing perimeters that are unparallel to each other, the electrode region being further shaped to be substantially linear symmetric about a symmetric axis that is perpendicular to a direction of current flowing through the piezoelectric thin film resonator in a plan view;
any one of the pair of perimeters opposes an electrode region of an adjacent piezoelectric thin film resonator;
spacing between the perimeter and the opposing perimeter of the electrode region of the adjacent piezoelectric thin film resonator is constant; and
the symmetric axis of one of the plurality of piezoelectric thin film resonators is substantially parallel to the symmetric axis of at least another one of the plurality of piezoelectric thin film resonators.