Thick film layers and methods relating thereto
View Patent ↗Thick film layers for a micro-fluid ejection head, micro-fluid ejection heads, and methods for making micro-fluid ejection head and thick film layers. One such thick film layer is derived from a difunctional epoxy component having a weight average molecular weight ranging from about 2500 to about 4000 Daltons, a photoacid generator, an aryl ketone solvent, and an adhesion enhancing component. One such thick film layer has a cross-link density upon curing that increases the dimensional stability of the thick film layer sufficient to provide flow features therein having substantially vertical walls.
1. A method for increasing the planarity of a surface of a thick film layer after photoimaging and developing flow features therein for a micro-fluid ejection head, the method comprising:
applying a negative photoresist layer to a device surface of a substrate, wherein the negative photoresist layer is derived from a multi-functional epoxy compound, a difunctional epoxy compound, a photoacid generator devoid of aryl sulfonium salts, an adhesion enhancer, and an aryl ketone solvent;
heating the photoresist layer to remove at least a portion of the solvent;
cooling the photoresist layer;
etching a fluid feed slot through the substrate from a backside of the substrate opposite the device surface, wherein the heated and cooled photoresist layer serves as an etch stop to the etching; and thereafter
imaging flow features in the photoresist layer; and
developing the imaged photoresist layer to provide the plurality of flow features therein and the substantially planar thick film layer surface.
2. The method of claim 1 , wherein the photoacid generator comprises a diaryliodonium hexafluoroantimonate.
3. The method of claim 1 , wherein the negative photoresist layer includes substantially equal parts of the multi-functional epoxy compound and the difunctional epoxy compound.
4. The method of claim 1 , wherein the photoresist layer is applied to the substrate by spin coating the photoresist layer onto the substrate.
5. The method of claim 1 , wherein the adhesion enhancer comprises gamma-glycidoxypropyltrimethoxysilane.