Method of manufacturing a shapeable short-resistant capacitor
View Patent ↗A method that employs a novel combination of conventional fabrication techniques provides a ceramic short-resistant capacitor that is bendable and/or shapeable to provide a multiple layer capacitor that is extremely compact and amenable to desirable geometries. The method allows thinner and more flexible ceramic capacitors to be made. The method includes forming a first thin metal layer on a substrate; depositing a thin, ceramic dielectric layer over the metal layer; depositing a second thin metal layer over the dielectric layer to form a capacitor exhibiting a benign failure mode; and separating the capacitor from the substrate. The method may also include bending the resulting capacitor into a serpentine arrangement with gaps between the layers that allow venting of evaporated electrode material in the event of a benign failure.
1. A method of making a shapeable, short-resistant capacitor, comprising:
providing a rigid substrate;
depositing a first metal layer on the substrate;
depositing a ceramic layer on the first metal layer;
depositing a second metal layer on the ceramic layer to form a short-resistant capacitor comprising the ceramic layer disposed between the first metal layer and the second metal layer;
separating the short-resistant capacitor from the substrate; and
bending the resulting short-resistant capacitor into a serpentine-arrangement with gaps between the layers that allow venting of evaporated electrode material in the event of a benign failure.
2. The method of claim 1 , wherein the substrate is comprised of quartz.
3. The method of claim 1 , wherein the first metal layer is comprised of a material selected from the group consisting of nickel, aluminum, copper, zinc, silver, gold, platinum, titanium, chrome and tungsten.
4. The method of claim 3 , wherein the first metal layer is deposited at a thickness of from about 0.1 micrometers to 500 micrometers.
5. The method of claim 1 , wherein the ceramic material is lead lanthanum zirconium titanate (PLZT).
6. The method of claim 1 , wherein the ceramic layer is deposited to a thickness of from about 0.1 micrometers to about 4 micrometers.
7. The method of claim 1 , wherein the second metal layer is deposited to a thickness of from about 0.01 micrometers to about 0.1 micrometers.
8. The method of claim 7 , wherein the second metal layer is comprised of a material selected from aluminium, platinum, copper, zinc, silver, gold and combinations of these metals.