Method of forming printhead by removing sacrificial material through nozzle apertures
View Patent ↗A method of fabricating an inkjet printhead by forming a plurality of actuators on a monolithic substrate, covering the actuators with a sacrificial material, covering the sacrificial material with a printhead surface layer, defining a plurality of nozzle apertures in the printhead surface layer such that each of the actuators corresponds to one of the nozzle apertures and then, removing at least some of the sacrificial material on each of the actuators through the nozzle aperture corresponding to each of the actuators.
1. A method of fabricating an inkjet printhead comprising the steps of:
forming a plurality of actuators on a monolithic substrate;
covering the actuators with a sacrificial material;
covering the sacrificial material with a printhead surface layer;
defining a plurality of nozzle apertures in the printhead surface layer such that each of the actuators corresponds to one of the nozzle apertures; and,
removing at least some of the sacrificial material on each of the actuators through the nozzle aperture corresponding to each of the actuators.