Semiconductor storage device, semiconductor storage device manufacturing method and package resin forming method
View Patent ↗A ferroelectric capacitor comprising a transistor layer superimposed on a semiconductor substrate, a ferroelectric capacitor layer provided superior to the transistor layer, a wiring layer provided superior to the ferroelectric capacitor layer, and a passivation film. Further, at least one layer of barrier film capable of inhibiting penetration of moisture and hydrogen into the underlayer is provided between the ferroelectric capacitor layer and the passivation film, and the passivation film is characterized by containing a novolac resin.
1. A semiconductor storage device comprising:
a transistor formed on a semiconductor substrate;
a ferroelectric capacitor formed above said transistor;
a wiring layer formed above said ferroelectric capacitor;
a silicon nitride film formed above the ferroelectric capacitor;
a passivation film formed above the silicon nitride film; and
an oxygen barrier film covering said passivation film containing the novolac resin, and restraining the permeation of the hydrogen into the lower layer,
wherein a first barrier film restraining a water content and hydrogen from permeating a lower layer is formed between said ferroelectric capacitor and said passivation film, and
said passivation film contains a novolac resin.
2. The semiconductor storage device according to claim 1 , further comprising a pad electrode connecting said wiring layer to an external circuit,
wherein said passivation film containing the novolac resin is not formed on said pad electrode.
3. The semiconductor storage device according to claim 2 , further comprising a metal protective film over said passivation film except for an outline ring portion of the passivation film around the pad electrode.
4. The semiconductor storage device according to claim 3 , wherein said metal protective film is formed above at least one of a region of a ferroelectric capacitor portion, a region of a logic circuit portion and a region of a peripheral circuit portion.
5. The semiconductor storage device according to claim 3 , wherein said metal protective film is a multi-layer metal film including two or more types of layers.
6. The semiconductor storage device according to claim 3 , wherein one layer of said multi-layer metal film is a palladium film.
7. The semiconductor storage device according to claim 2 , further comprising a metal bump on said pad electrode.
8. The semiconductor storage device according to claim 1 , wherein said first barrier film is grown as a flat film up to a thickness equal to or larger than 20 nm in a region between said ferroelectric capacitor and the novolac resin.
9. The semiconductor storage device according to claim 1 , wherein said oxygen barrier film is a film including any one or more of a SiON film, a SiN film, an Al 2 O 3 film, an AlxOy film, a TiO 2 film, a TiOx film, a ZrOx film, a MgOx film and a MgTiOx film (where x and y are positive integers).
10. The semiconductor storage device according to claim 1 , wherein said oxygen barrier film is grown up to a thickness equal to or larger than at least 20 nm.
11. The semiconductor storage device according to claim 1 , wherein the novolac resin is formed in an inactive gas atmosphere or a nitrogen atmosphere by such a thermal treatment that a curing temperature ranges from 170° C. to 190° C., and a period of time is 40 min.
12. The semiconductor storage device according to claim 1 , further comprising a second barrier film restraining a water content and hydrogen over the ferroelectric capacitor and under the first barrier film.