Thin film transistor display panel and method of manufacturing the same
View Patent ↗A thin film transistor display panel includes an insulating substrate, gate lines and data lines disposed intersecting each other on the insulating substrate so as to be electrically insulated from each other, common lines provided on the insulating substrate in parallel to the gate lines, a gate insulating film disposed on the gate lines and the common lines, contact holes disposed passing through the gate insulating film disposed on the common lines, a plurality of common electrodes electrically connected to the common lines through the contact holes and arranged in parallel to each other, and a plurality of pixel electrodes arranged in parallel to the common electrodes. The thickness of the common electrode and the pixel electrode is smaller than that of the data line.
1. A thin film transistor display panel comprising:
an insulating substrate;
gate lines disposed on a first surface of the insulating substrate and extended in a first direction;
data lines disposed on the first surface of the insulating substrate and extended in a second direction substantially perpendicular to the first direction, the data lines and the gate lines being electrically insulated from each other;
common lines disposed on the insulating substrate and extended substantially in parallel to the gate lines;
a gate insulating film disposed on the gate lines and the common lines;
contact holes disposed through the gate insulating film and exposing a portion of the common lines;
a plurality of common electrodes electrically connected to the common lines through the contact holes, arranged extended in the second direction and disposed substantially in parallel to each other;
a plurality of pixel electrodes arranged extended substantially in parallel to the common electrodes; and
thin film transistors each including a gate electrode connected to the gate lines, a source electrode connected to the data lines, and a drain electrode connected to the pixel electrodes,
wherein
a first thickness of the common electrodes and of the pixel electrode, is smaller than a second thickness of the data lines, the first and second thicknesses taken in a third direction substantially perpendicular to the first surface of the insulating substrate, and
a third thickness of the drain electrode is smaller than a fourth thickness of the source electrode, the third and fourth thicknesses taken in the third direction substantially perpendicular to the first surface of the insulating substrate.
2. The thin film transistor display panel of claim 1 , wherein
each of the common electrodes and the pixel electrodes includes a single layer structure; and
the data lines include a multi-layer structure.
3. The thin film transistor display panel of claim 2 , wherein:
the common electrodes and the pixel electrodes include copper; and
the data lines include an upper layer including at least one of copper (Cu) and molybdenum (Mo), and a lower layer including at least one of molybdenum (Mo), titanium (Ti), chrome (Cr), tungsten (W), and aluminum (Al).
4. The thin film transistor display panel of claim 3 , wherein:
the common electrodes, the pixel electrodes, and the lower layer of the data lines each have a thickness of less than about 50 nanometers (nm); and
the upper layer of the data lines has a thickness of more than about 1500 Å.
5. The thin film transistor display panel of claim 1 , wherein:
the drain electrode includes a single layer structure; and
the sourced electrode includes a multi-layer structure.
6. The thin film transistor display panel of claim 1 , wherein the common electrodes and the pixel electrodes are alternately arranged in the first direction.
7. The thin film transistor display panel of claim 1 , further comprising a first protective film disposed directly on and contacting the pixel electrodes and the common electrodes.
8. The thin film transistor display panel of claim 7 , further comprising a second protective film disposed directly on and contacting an uppermost surface of the data lines and an uppermost surface of the first protective film.
9. A thin film transistor display panel comprising:
an insulating substrate;
gate lines disposed on a first surface of the insulating substrate and extended in a first direction:
data lines disposed on the first surface of the insulating substrate and extended in a second direction substantially perpendicular to the first direction, the data lines and the gate lines being electrically insulated from each other;
common lines disposed on the insulating substrate and extended substantially in parallel to the gate lines;
a gate insulating film disposed on the gate lines and the common lines;
contact holes disposed through the gate insulating film and exposing a portion of the common lines;
a plurality of common electrodes electrically connected to the common lines through the contact holes, arranged extended in the second direction and disposed substantially in parallel to each other;
a plurality of pixel electrodes arranged extended substantially in parallel to the common electrodes; and
thin film transistors each including a gate electrode connected to the gate lines, a source electrode connected to the data lines, and a drain electrode connected to the pixel electrodes; and
a single connecting electrode connecting the pixel electrodes and the drain electrodes, the connecting electrode, the pixel electrodes and the drain electrodes being a continuous member;
wherein a third thickness of the drain electrode and of the connecting electrode, is smaller than a fourth thickness of the source electrode, the third and fourth thicknesses taken in the third direction substantially perpendicular to the first surface of the insulating substrate.
10. A method of manufacturing a thin film transistor display panel, the method comprising:
forming on a first surface of an insulating substrate, a plurality of gate lines extended in a first direction, and a plurality of common lines arranged substantially in parallel to the gate lines;
forming a gate insulating film on and contacting the gate lines and the common lines;
forming contact holes in the gate insulating film and disposed overlapping the common lines;
forming a plurality of common electrodes electrically connected to the common lines through the contact holes, extended in a second direction substantially perpendicular to the first direction, and arranged in parallel to each other, a plurality of pixel electrodes extended in the second direction and arranged in parallel to the common electrodes, and a plurality of data lines intersecting the gate lines; and
forming thin film transistors each including a gate electrode connected to the gate lines, a source electrode connected to the data lines, and a drain electrode connected to the pixel electrodes,
wherein
a first thickness of the common electrodes and of the pixel electrodes is smaller than a second thickness of the data lines, the first and second thicknesses taken in a third direction substantially perpendicular to the first surface of the insulating substrate, and
a third thickness of the drain electrode is smaller than a fourth thickness of the source electrode, the third and fourth thicknesses taken in the third direction substantially perpendicular to the first surface of the insulating substrate.
11. The method of claim 10 , wherein:
each of the common electrodes and the pixel electrodes include a single layer structure; and
the data lines include a multi-layer structure.
12. The method of claim 11 , wherein:
the common electrodes and the pixel electrodes include copper; and
the data lines include an upper layer including at least one of copper (Cu) and molybdenum (Mo), and a lower layer including at least one of molybdenum (Mo), titanium (Ti), chrome (Cr), tungsten (W), and aluminum (Al).
13. The method of claim 10 , wherein:
the drain electrode includes a single layer structure; and
the source electrode includes a multi-layer structure.
14. The method of claim 10 , wherein the common electrodes and the pixel electrodes are alternately arranged in the first direction.
15. The method of claim 10 , wherein the forming the data lines, the common electrodes, and the pixel electrodes comprises:
sequentially forming a first data conductive layer and a second data conductive layer on the insulating substrate;
forming a photoresist pattern on the first and second data conductive layers using a slit mask or a halftone mask; and
etching the first and second data conductive layers using the photoresist pattern as an etching mask.
16. The method of claim 15 , wherein:
the photoresist pattern includes a first region overlapping the data lines, and a second region overlapping both the common electrodes and the pixel electrodes; and
the second region of the photoresist pattern is thinner than the first region in the third direction.
17. The method of claim 10 , further comprising forming a first protective film on the pixel electrodes and the common electrodes.
18. The method of claim 17 , further comprising forming a second protective film on the data lines and the first protective film.