Semiconductor device and method for fabricating the same
View Patent ↗A semiconductor device includes: a high dielectric constant gate insulating film formed on an active region in a substrate; a gate electrode formed on the high dielectric constant gate insulating film; and an insulating sidewall formed on each side surface of the gate electrode. The high dielectric constant gate insulating film is continuously formed so as to extend from under the gate electrode to under the insulating sidewall. At least part of the high dielectric constant gate insulating film located under the insulating sidewall has a smaller thickness than a thickness of part of the high dielectric constant gate insulating film located under the gate electrode.
1. A semiconductor device comprising:
a high dielectric constant gate insulating film formed on an active region in a substrate;
a gate electrode formed on the high dielectric constant gate insulating film;
a first insulating sidewall formed on each side surface of the gate electrode; and
a second insulating sidewall formed on said each side surface of the gate electrode with the first insulating sidewall interposed therebetween,
wherein the high dielectric constant gate insulating film is continuously formed so as to extend from under the gate electrode to under the first insulating sidewall, and
part of the high dielectric constant gate insulating film located under the first insulating sidewall has a smaller thickness than a thickness of part of the high dielectric constant gate insulating film located under the gate electrode.
2. The semiconductor device of claim 1 , further comprising a buffer insulating film between the substrate and the high dielectric constant gate insulating film.
3. The semiconductor device of claim 2 , wherein the buffer insulating film is a silicon oxide film.
4. The semiconductor device of claim 1 , wherein the first insulating sidewall is an offset sidewall.
5. The semiconductor device of claim 1 , wherein the high dielectric constant gate insulating film is formed so as not to be located under the second insulating sidewall.
6. The semiconductor device of claim 1 , wherein the high dielectric constant gate insulating film is formed of a Hf based oxide.
7. The semiconductor device of claim 1 , wherein the high dielectric constant gate insulating film is formed of a HfSiON film.
8. The semiconductor device of claim 1 , wherein an extension region of a first conductivity type is formed in each of parts of the active region located under the first insulating sidewall and the second insulating sidewall, and
a pocket region of a second conductivity type is formed in part of the active region located under the extension region.
9. The semiconductor device of claim 8 , wherein each of source/drain regions of a first conductivity type is formed in part of the active region located in an external side to the extension region and the pocket region when viewed from the gate electrode.
10. The semiconductor device of claim 1 , wherein the high dielectric constant gate insulating film includes a notch at a side end portion.
11. The semiconductor device of claim 1 , wherein each side end portion of the high dielectric constant gate insulating film has a thickness of 2 nm or less.
12. The semiconductor device of claim 1 , wherein a side surface of the high dielectric constant gate insulating film is located at a predetermined distance from a side end surface of the first insulating sidewall toward the gate electrode.
13. The semiconductor device of claim 1 , wherein a side surface of the high dielectric constant gate insulating film is located at a predetermined distance from a side end surface of the gate electrode toward the first insulating sidewall.
14. The semiconductor device of claim 1 , wherein the second insulating sidewall has a double layer structure including an oxide film and a nitride film.
15. The semiconductor device of claim 1 , wherein the second insulating sidewall has a triple layer structure including a first oxide film, a nitride film and a second oxide film.
16. The semiconductor device of claim 1 , wherein a width of the high dielectric constant gate insulating film along a gate length is larger than a width of the gate electrode along the gate length.
17. The semiconductor device of claim 1 , wherein a width of a bottom surface of the high dielectric constant gate insulating film along a gate length is larger than a width of a bottom surface of the gate electrode along the gate length.
18. The semiconductor device of claim 1 , wherein the high dielectric constant gate insulating film has a relative dielectric constant of 10 or more.
19. The semiconductor device of claim 1 , wherein the high dielectric constant gate insulating film has a larger relative dielectric constant than that of the second insulating sidewall.
20. The semiconductor device of claim 1 , wherein the high dielectric constant gate insulating film is formed to have a convex cross-sectional shape.
21. The semiconductor device of claim 1 , wherein each side end portion of the high dielectric constant gate insulating film is not in contact with the first insulating sidewall.