Image sensor and method for manufacturing the same
View Patent ↗Disclosed are an image sensor and a method of manufacturing the same. The image sensor includes a substrate including a pixel area and a logic circuit area; an interlayer dielectric layer on the substrate and having a trench in the pixel area; and an insulating layer microlens formed in the trench of the interlayer dielectric layer. According to the method, a substrate including a pixel area and a logic circuit area is prepared; an interlayer dielectric layer is formed on the substrate; a first microlens pattern is formed on the interlayer dielectric layer on the pixel area; and a second microlens pattern is formed by etching the interlayer dielectric layer on the pixel area using the first microlens pattern as an etch mask. During the etching, a second photoresist pattern, exposing the first microlens pattern, can be used to protect the interlayer dielectric layer on the logic circuit area.
1. A method of manufacturing an image sensor, the method comprising:
preparing a substrate including a pixel area and a logic circuit area;
forming an interlayer dielectric layer on the substrate;
forming a first microlens pattern on the interlayer dielectric layer on the pixel area;
after the first microlens pattern is formed, forming a photoresist pattern on the interlayer dielectric layer, the photoresist pattern exposing the first microlens pattern; and
forming a second microlens pattern by etching the interlayer dielectric layer on the pixel area using the first microlens pattern as an etch mask.
2. The method according to claim 1 , wherein the top of the second microlens pattern is formed below the top surface of the interlayer dielectric layer.
3. The method according to claim 1 , wherein the second microlens pattern is formed by etching the interlayer dielectric layer on the pixel area using the first microlens pattern and the photoresist pattern as an etch mask, whereby the second microlens pattern is formed in a trench in the interlayer dielectric layer.
4. The method according to claim 1 , wherein the first microlens pattern is formed using a photoresist layer.
5. The method according to claim 1 , wherein the second microlens pattern is formed through transfer of the first microlens pattern.
6. The method according to claim 1 , further comprising, after the second microlens pattern is formed, forming a third microlens pattern on the second microlens pattern.
7. The method according to claim 6 , wherein the third microlens pattern is formed using an insulating layer.