Self-assembled nano-lithographic imprint masks
View Patent ↗The present disclosure relates to techniques for replicating large-scale nano-pattern structures using a block copolymer structure as a mask in a replication process. Example methods may include performing self-assembling block copolymer reactions to create large self-assembling nano-structures. The nano-structures may then be replicated by using the large self-assembling nano-structure as a mask in nano-imprint lithography.
1. A method for replicating large-scale nano-pattern structures, comprising:
forming a first patterned substrate comprising a first substrate with a positive pattern by performing self-assembling block copolymer reactions on the first substrate, wherein the positive pattern comprises a large-scale nano-patterned structure including block copolymer structures; and
patterning a second substrate with a negative imprint of the positive pattern of the first substrate by at least partially coating a surface of the second substrate with the coating, wherein the coating comprises an imprint resist material, pressing the first patterned substrate including the block copolymer structures into a coating on the second substrate to form a negative pattern, wherein pressing the first patterned substrate including the block copolymer structures into a coating on the second substrate forms a temporary combined unit, and transferring the negative pattern to the second substrate to form a second patterned substrate by curing the temporary combined unit and removing the first patterned substrate.
2. The method of claim 1 , wherein the performing self-assembling block copolymer reactions comprises:
at least partially coating a surface of the first substrate with a solution to form a block copolymer film;
placing a plate over the surface;
moving the plate across the surface of the first substrate such that the block copolymer film self-organizes at a receding edge of the plate to form a pre-patterned substrate; and
annealing the pre-patterned substrate to form the patterned substrate.
3. The method of claim 2 , wherein the solution comprises a diblock copolymer solution.
4. The method of claim 3 , wherein the diblock copolymer solution comprises polystyrene-block-poly(methyl methacrylate) dissolved in toluene.
5. The method of claim 2 , wherein the annealing is performed at approximately 190° C.
6. The method of claim 1 , wherein the curing is performed by heat or by ultraviolet light.
7. The method of claim 1 , wherein the second substrate comprises silicon.
8. The method of claim 3 , wherein the imprint resist comprises a polymer.
9. The method of claim 1 , wherein the first substrate comprises silicon.
10. The method of claim 1 , further comprising using the second patterned substrate as a mask in performing an other nano-imprint lithography to create a third patterned substrate with a positive pattern imprint.
11. The method of claim 10 , wherein the an other nano-imprint lithography is performed by roll-to-roll or roll-on nano-imprint lithography.
12. A method for replicating positive image imprints of large-scale nano-pattern structures, comprising:
performing self-assembling block copolymer reactions on a first substrate to form a first patterned substrate comprising a positive self-assembled nano-structure pattern including block copolymer structures;
pressing the first patterned substrate including the block copolymer structures into a coating on a second substrate to create a negative pattern by at least partially coating a surface of the second substrate with the coating comprising an imprint resist material, wherein pressing the first patterned substrate into the coating creates a temporary combined unit;
transferring the negative pattern to the second substrate to form a second patterned substrate with a negative imprint pattern of the positive self-assembled nano-structure by curing the temporary combined unit and removing the second patterned substrate; and
using the second patterned substrate as a mask in a nano-imprint lithography process to create a substrate with a positive pattern imprint of the positive self-assembled nano-structure.
13. The method of claim 12 , wherein the nano-imprint lithography process is a roll-to-roll or a roll-on nano-imprint lithography process.
14. The method of claim 12 , wherein the positive self-assembled nano-structure pattern comprises a diffuser pattern for a liquid crystal display screen.
15. The method of claim 12 , wherein the positive self-assembled nano-structure pattern comprises a speckle-reduction pattern for projection displays using laser light sources.
16. The method of claim 12 , wherein the performing self-assembling block copolymer reactions comprises:
at least partially coating a surface of the first substrate with a solution to form a block copolymer film;
placing a plate over the surface;
moving the plate across the surface of the first substrate such that the block copolymer film self-organizes at a receding edge of the plate to form a pre-patterned substrate; and
annealing the pre-patterned substrate to form the patterned substrate.
17. A combined unit for use in replicating large-scale nano-pattern structures, comprising:
a first patterned substrate including a pattern on a surface thereof, wherein the pattern includes block copolymer structures, and wherein the pattern is achieved through block copolymer reactions comprising:
at least partially coating a surface of a first substrate with a solution to form a block copolymer film on the surface;
placing a plate over the surface;
moving the plate across the surface of the first substrate such that the block copolymer film self-organizes at a receding edge of the plate to form a pre-patterned substrate; and
annealing the pre-patterned substrate to form the patterned substrate; and
a second substrate having a surface at least partially coated with an imprint resist material, wherein the pattern on the surface of the first patterned substrate, including the block copolymer structures, is pressed into the at least partially coated surface of the second substrate.