Method of manufacturing a photoelectronic device
View Patent ↗This application discloses a method of manufacturing a photoelectronic device comprising steps of providing a semiconductor stack layer, forming at least one metal adhesive on the semiconductor stack layer by a printing technology, forming an electrode by heating the metal adhesive to remove the solvent in the metal adhesive, wherein an ohmic contact is formed between the electrode and the semiconductor stack layer.
1. A method for manufacturing a photoelectronic device, comprising:
providing a semiconductor stack layer;
etching a portion of the surface of the semiconductor stack layer, wherein the surface of the semiconductor stack layer includes an etched portion and an unetched portion;
forming a first metal adhesive by a printing technology on the unetched portion of the surface of the semiconductor stack layer;
providing a first energy on the first metal adhesive to form a first electrode, wherein an ohmic contact is formed between the first electrode and the unetched portion of the surface of the semiconductor stack layer;
forming a second metal adhesive by a printing technology on the etched surface of the semiconductor stack layer; and
providing a second energy on the second metal adhesive to form a second electrode, wherein an ohmic contact is formed between the second electrode and the etched surface of the semiconductor stack layer.
2. The method for manufacturing a photoelectronic device according to claim 1 , further providing a substrate between the second electrode and the semiconductor stack layer.
3. The method for manufacturing a photoelectronic device according to claim 2 , wherein the material of the substrate is selected from silicon, silicon carbide, zinc oxide, gallium arsenic, gallium phosphide, germanium conductive materials or sapphire, glass, diamond insulation materials.
4. The method for manufacturing a photoelectronic device according to claim 1 , wherein the material of the semiconductor stack layer comprising at least one or more elements selected from the group consisting of gallium, aluminum, indium, arsenic, phosphorous, nitrogen, and silicon.
5. The method for manufacturing a photoelectronic device according to claim 1 , wherein the semiconductor stack layer including at least a first conductive type semiconductor layer, an active layer, and a second conductive type semiconductor layer from up to down.
6. The method for manufacturing a photoelectronic device according to claim 1 , wherein the semiconductor stack layer including at least one p-n junction which is stacked by a first conductive type semiconductor layer and a second conductive type semiconductor layer.
7. The method for manufacturing a photoelectronic device according to claim 1 , wherein the semiconductor stack layer further including a tunnel junction structure.
8. The method for manufacturing a photoelectronic device according to claim 1 , wherein the first metal adhesive and the second metal adhesive comprising metal particles and solvent.
9. The method for manufacturing a photoelectronic device according to claim 8 , wherein the metal particles are at least one material selected from the group consisting of gold, silver, copper, molybdenum, nickel, zinc, tin, aluminum, beryllium, germanium, palladium, titanium, platinum, and the alloys thereof.
10. The method for manufacturing a photoelectronic device according to claim 8 , wherein the energy is heat.
11. The method for manufacturing a photoelectronic device according to claim 1 , further including a step of forming an anti-reflector layer on the semiconductor stack layer.