Elimination of short circuits between conductors by laser ablation
View Patent ↗A method of selectively eliminating electrical shorts and other electrical defects from specific layers of a multilayer electronic device without damaging underlying layers. The method is based on a combination of an automated detection of the defects and selective laser ablation patterning (SLAP).
1. A method of processing a product defining a plurality of part or whole electronic devices, the method comprising:
patterning a conductive layer by a laser ablation technique to produce a patterned conductive layer;
automated identifying of an electrical defect in the patterned conductive layer by a comparison of the pattern of a plurality of regions of the product; and
the step of eliminating said electrical defect by further application of said laser ablation technique.
2. A method according to claim 1 , wherein the electrical defect is an electrical short, and the step of eliminating said electrical defect comprises removing conductive material so as to isolate one conductive element from another, co-planar conductive element.
3. A method according to claim 2 , wherein the laser ablation is carried out so as to avoid any substantial degradation of a layer directly below the conductive material to be removed.
4. A method according to claim 3 , comprising using a single laser pulse to remove said conductive material and expose the layer directly below the conductive material.
5. A method according to claim 1 , wherein the electrical defect is an electrical short caused by a piece of unwanted conductive material bridging two conductive regions of the plurality of electronic devices.
6. A method according to claim 5 , wherein the two conductive regions are an electrode and an interconnect.
7. A method according to claim 6 , wherein the electrode is a gate electrode and the interconnect is a COM line.
8. A method according to claim 5 , wherein the two conductive regions are the source and drain electrodes of one of said plurality of electronic devices.
9. A method according to claim 5 , wherein the two conductive regions are the pixel electrode of one electronic device and the pixel electrode of another electronic device.
10. A method according to claim 5 , wherein the two conductive regions are a gate electrode and a source and/or drain electrode.
11. A method according to claim 1 , wherein the plurality of electronic devices include one or more organic elements.
12. A method according to claim 5 , comprising laser ablation of a part of at least one of said two conductive regions.
13. A method of processing a product defining a plurality of part or whole electronic devices, the method comprising:
providing a patterned conductive layer defining at least two conductive lines;
automated identifying of an electrical defect caused by a conductive bridge between the said two conductive lines by a comparison of the pattern of a plurality of regions of the product; and
isolating the conductive bridge by removing one or more parts of one of said conductive lines.
14. A method according to claim 13 , wherein isolating the conductive bridge by removing one or more parts of one of said conductive lines is done whilst maintaining a function of said one of said conductive lines.
15. A method of processing a product defining a plurality of part or whole electronic devices, the method comprising:
automated identifying of an electrical defect caused by a conductive bridge between a conductive element at an upper level and a conductive element at a lower level by a comparison of the pattern of a plurality of regions of the product; and
isolating the conductive bridge by removing one or more parts of one of said upper conductive element.
16. A method according to claim 15 , wherein isolating the conductive bridge by removing one or more parts of one of said upper conductive element is done whilst maintaining a function of said upper conductive element.